JPS6210778B2 - - Google Patents

Info

Publication number
JPS6210778B2
JPS6210778B2 JP53019216A JP1921678A JPS6210778B2 JP S6210778 B2 JPS6210778 B2 JP S6210778B2 JP 53019216 A JP53019216 A JP 53019216A JP 1921678 A JP1921678 A JP 1921678A JP S6210778 B2 JPS6210778 B2 JP S6210778B2
Authority
JP
Japan
Prior art keywords
lap
plate
correction
carrier
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53019216A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54112091A (en
Inventor
Koichiro Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoshi Machinery Corp
Original Assignee
Fujikoshi Kikai Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoshi Kikai Kogyo KK filed Critical Fujikoshi Kikai Kogyo KK
Priority to JP1921678A priority Critical patent/JPS54112091A/ja
Publication of JPS54112091A publication Critical patent/JPS54112091A/ja
Publication of JPS6210778B2 publication Critical patent/JPS6210778B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1921678A 1978-02-22 1978-02-22 Lap surface compensator of lapping machine Granted JPS54112091A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1921678A JPS54112091A (en) 1978-02-22 1978-02-22 Lap surface compensator of lapping machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1921678A JPS54112091A (en) 1978-02-22 1978-02-22 Lap surface compensator of lapping machine

Publications (2)

Publication Number Publication Date
JPS54112091A JPS54112091A (en) 1979-09-01
JPS6210778B2 true JPS6210778B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-09

Family

ID=11993170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1921678A Granted JPS54112091A (en) 1978-02-22 1978-02-22 Lap surface compensator of lapping machine

Country Status (1)

Country Link
JP (1) JPS54112091A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5649720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-04-16 1981-11-19
JPS6017947U (ja) * 1983-07-18 1985-02-06 東芝機械株式会社 ポリシング装置の洗浄用ブラシ
JPS60161557U (ja) * 1984-03-31 1985-10-26 ホ−ヤ株式会社 研磨布のドレツシング具
JPH09314457A (ja) * 1996-05-29 1997-12-09 Speedfam Co Ltd ドレッサ付き片面研磨装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52169187U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-06-16 1977-12-22

Also Published As

Publication number Publication date
JPS54112091A (en) 1979-09-01

Similar Documents

Publication Publication Date Title
US5394655A (en) Semiconductor polishing pad
KR100425937B1 (ko) 표면가공방법 및 장치
US5690542A (en) Disc streak pattern forming method and apparatus
JPS62176755A (ja) 平面研磨装置
JPS6210778B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH02167674A (ja) 研磨装置
JPH07314305A (ja) バリ取り装置
CN115256233A (zh) 一种双面研磨机台的盘面修整工艺
US2805525A (en) Grinding machine utilizing abrasive discs
JP3738571B2 (ja) ローディングカム装置のカム面の加工方法及び加工装置
JPH03251363A (ja) ラップ加工方法および両面ラップ盤
JPH07178655A (ja) ガラス板の研磨方法
JP4250594B2 (ja) 遊星ギヤ機構を用いた移動装置及び平面研磨機
JP2907856B2 (ja) 研削砥石のドレッシング方法
JPS6158270B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0525806Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS60155357A (ja) 平面加工装置
JP2004255483A (ja) 研磨装置及び研磨方法
JPH0663861A (ja) ラッピング装置
JPH0222213Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2579052Y2 (ja) 歯車ホーニング盤における内歯車形砥石の機上ドレス装置
JPH08127Y2 (ja) ワークのラッピング装置
JPH02145253A (ja) ラップ盤の自己修正方法
JP2006075966A (ja) クランクシャフトの研磨装置及びクランクシャフトの研磨方法
JP2690976B2 (ja) ラップ定盤の修正方法