JPS62106101U - - Google Patents
Info
- Publication number
- JPS62106101U JPS62106101U JP19885885U JP19885885U JPS62106101U JP S62106101 U JPS62106101 U JP S62106101U JP 19885885 U JP19885885 U JP 19885885U JP 19885885 U JP19885885 U JP 19885885U JP S62106101 U JPS62106101 U JP S62106101U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- optical sensor
- detection
- gap
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 6
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19885885U JPS62106101U (enExample) | 1985-12-24 | 1985-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19885885U JPS62106101U (enExample) | 1985-12-24 | 1985-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62106101U true JPS62106101U (enExample) | 1987-07-07 |
Family
ID=31159939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19885885U Pending JPS62106101U (enExample) | 1985-12-24 | 1985-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62106101U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2502443B2 (ja) * | 1991-01-30 | 1996-05-29 | 日本鋼管株式会社 | エリプソメ―タ及びこれを用いた塗布厚制御方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5828831B2 (ja) * | 1978-03-31 | 1983-06-18 | 株式会社東芝 | 誘導電動機の制御装置 |
| JPS59154305A (ja) * | 1983-02-23 | 1984-09-03 | Matsushita Electric Ind Co Ltd | 検出ヘツドの清浄装置 |
-
1985
- 1985-12-24 JP JP19885885U patent/JPS62106101U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5828831B2 (ja) * | 1978-03-31 | 1983-06-18 | 株式会社東芝 | 誘導電動機の制御装置 |
| JPS59154305A (ja) * | 1983-02-23 | 1984-09-03 | Matsushita Electric Ind Co Ltd | 検出ヘツドの清浄装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2502443B2 (ja) * | 1991-01-30 | 1996-05-29 | 日本鋼管株式会社 | エリプソメ―タ及びこれを用いた塗布厚制御方法 |