JPS62105607A - Fixture for inner-circumferential edge blade - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] Field of Application A slicing machine is used to cut an ingot of silicon or the like into thin wafers in a semiconductor manufacturing process. The present invention relates to a mounting device for mounting a blade having a cutting edge on the inner circumference of this slicing machine.

Prior Art In conventional slicing machines, the blades were replaced and relined on the machine. However, large-diameter blades have a large number of tightening screws around their outer periphery, which are sequentially tightened while detecting the position of the inner blade. At this time, a large number of screws are sequentially tightened many times, which requires a great deal of time, skill, and effort, and during this time the machine is at rest, reducing efficiency. However, inaccurate work not only reduces the flatness of the cut wafer and the parallelism of the upper and lower surfaces, but also affects the life of the blade and the vibration of the machine.

The present invention is intended to allow the main operations of removing, attaching, and tensioning the blade to be carried out stably without requiring anyone to obtain a blade.

Figure 3 shows a conventional blade holding and rotating mechanism.
Place the blade 2 on top g4 of the bowl-shaped rotating body 1, place the mounting ring 3 on top of it, and tighten the blade 2 with a large number of screws 5.
(hereinafter, this screw 5 will be referred to as a fixing screw). Here, a shallow circumferential groove 6 is cut in the upper part 4 of the rotating body 1. Further, a deep groove 7 is cut in the upper mounting ring 3 to have the same diameter as this groove 6, and a holding ring 8 whose lower surface in cross section is semicircular is inserted into this groove 7. This holding ring 8 is then held down by a large number of screws 9 arranged at equal intervals (hereinafter, these screws 9 will be referred to as tightening screws).
. In addition, although the thickness of the blade is shown enlarged for explanatory purposes in the figure, it is actually a thin stainless steel plate, and when pressed from above with the holding ring 8, the blade curves and the position of the tip 11 is moves toward the outer periphery.

Therefore, by sequentially tightening the screws 9 little by little, the cutting edge 11 is adjusted to form a perfect circle with respect to the center of rotation.

In the present invention, as shown in FIG. 4, the upper part 4 of the congenital body 1 is separated from the congenital body 1 as an intermediate ring 10 and can be attached, but of course, even in the case of FIG. This can be implemented by improving the method.

Embodiments of the present invention> In the present invention, the above intermediate wheel 10. The attachment ring 3 is removed from the slicing machine and set in the inner peripheral blade attachment device according to the present invention to attach the blade.

In FIGS. 1 and 2, this device is equipped with a rotary table 15 that automatically rotates by a predetermined angle according to a command.
An intermediate wheel 10 is set concentrically thereon, and a blade 2 and a mounting ring 3 are placed on it. 8! Screw tightening machines 16 and 17 are installed on the machine to tighten the fixing screws 5 and tensioning screws 9 of the attached mounting ring 3 by the commanded amount.

Then, the inner blade position detector 18 is attached to the inner blade position of the blade 2, which is approximately on this line connecting the position of the tightening screw driver 17 and the rotation center of the rotary table 15. This detector can either press the probe tip from inside the inner blade and detect the inner blade position from the probe position, or it can be determined by the amount of light passing through by holding the blade edge with a light emitter and receiver. can be adopted.

In the present invention, it is necessary that the center of the intermediate wheel 10 precisely coincide with the center of the rotary table 15.

Therefore, it is desirable to provide a centering jig 19 for the intermediate wheel 10 for this purpose. And the above two closing files, 17
It is necessary to change the mounting position of the inner blade position detector 18 if the diameter of the blade changes, and therefore the inner blade position detector 18 is mounted on the fixed part in a variable mounting position.

The above equipment is used in the following order: First, set the intermediate ring 10 on the table with its center aligned, place the blade 2 and the mounting ring 3 on top of it, almost correct the position of the inner circular blade of the blade 2, and then tighten the fixing screw 5 with 8116. The table is rotated one after another to fix the champion in one piece. At this time, since the screws are arranged at equal intervals, the rotary table 15 is caused to perform fixed angle intermittent movements to tighten the screws 5 to a desired degree. Next, the table is rotated and the tensioning screws are sequentially tightened to the desired degree according to the commands from the detector 18, and finally the tensioning screws are sequentially tightened so that the signal related to the inner blade position of the detector 18 is equalized all around the circumference.

Here, the process may end when all the screws have rotated a predetermined number of revolutions, or a blade tension testing device (not shown) may be provided and the process may end when the tension becomes approximately constant.

Note that the detection of the blade position, screw designation, and tightening may be commanded by human judgment, or may be performed by preprogramming a microcomputer, but the tightening operation, rotational positioning, and detection The measurement and display of values is all done automatically.

Effects> According to the device of the present invention, all work that requires labor and time can be automatically performed by a machine, so that a large number of screws, for example, pre-made screws with a diameter of 27.5” (inner cutter diameter) In this case, there are 60 screws on the outer circumference and 30 screws on the inner circumference, but it is also possible to tighten them little by little according to the order, and the tension will be tightened so that the detected values are equal in the end, so you can accurately tighten the ideal tension. It is possible to raise the tension in a reasonable amount of time.

[Brief explanation of drawings]

FIG. 1 is a front view of the present invention, FIG. 2 is a plan view thereof, FIG. 3 is a sectional view showing the main parts of a conventional blade attachment mechanism, and FIG.
The figure is a sectional view of a main part of the blade attachment mechanism according to the present invention. Rotating body 2: Inner circular blade 3: Mounting ring 5: Fixing screw 8: Holding ring 9: Tensioning screw 10: Intermediate ring 15: Rotating table 16 Fixing screw screw tightening machine 17: Tensioning screw tightening machine

Claims (1)

[Claims] A rotary table that sets an intermediate ring that holds the inner peripheral blade with the upper mounting ring, the mounting ring, the outer periphery of the blade,
A screw tightener for the outer fixing screw to secure the intermediate ring together, a tightener for the inner tensioning screw that adjusts and fixes the tension of the blade, and a tightening machine for the inner tensioning screw. A mounting device for an inner circumferential blade, comprising a detector that is located approximately on a line connecting a tightening machine and a center point and detects the position of the inner circumferential edge of the blade, and is mounted on a fixed part in a variable position.