JPH0533304Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a workpiece support device that supports the processing position of the tip of a workpiece in a slicing machine used when slicing an ingot of silicon or the like.

[Prior Art and its Problems] Conventionally, wafers made of silicon or the like necessary for semiconductor manufacturing are formed by slicing a cylindrical ingot.

The slicing machine used to slice this ingot is configured to rotate a thin annular blade with a diamond grindstone formed on the inner periphery at high speed, and cut out the wafer by pressing this annular blade against the ingot. has been done. (Refer to Japanese Unexamined Patent Publication No. 60-4009, etc.) As one type of slicing machine, an annular blade is mounted vertically on a horizontally provided main shaft (that is, the rotation axis of the annular blade is horizontal), and the ingot is horizontally mounted. (horizontal), and the main shaft (circular blade)
There is a so-called horizontal type in which the ingot is sliced by vertically raising and lowering the ingot.

This has a workpiece mounting part that is movable in a direction parallel to the main axis, and one end surface of the ingot is adhesively fixed to the workpiece mounting part, and the lower side of the tip is supported by a workpiece support member. The ingot attachment section is moved forward to continuously cut out wafers of a predetermined thickness using an annular blade.

However, in the conventional configuration as described above, when the diameter of the ingot differs, the workpiece support member cannot hold the ingot well, and the ingot is bent in the processing section, making it impossible to maintain the processing accuracy of the slicing process. Sometimes. For this reason, it is necessary to replace the workpiece support member with one that matches the diameter of the ingot to be processed, resulting in a problem of poor work efficiency.

In addition, since the ingot is fixed to the workpiece mounting part by adhesive, it is difficult to accurately fix the ingot to the predetermined position of the workpiece mounting part.
Even when processing an ingot of a constant diameter, the work supporting member may not be able to properly support the tip of the ingot due to an error in the position of adhesion of the ingot to the ingot holder.

[Purpose of the invention] In view of the above-mentioned circumstances, the present invention aims to easily cope with the case where the diameter of the ingot is different or the position of adhesion of the ingot to the workpiece attachment part is shifted, and to hold the workpiece well. The purpose of the present invention is to provide a workpiece support device for a slicing machine that can be used in a slicing machine and has good workability.

[Configuration of the invention] Therefore, the workpiece support device of the slicing machine according to the invention includes a workpiece holding part that receives the workpiece, an eccentric member rotatably fitted to the workpiece holding part, and a workpiece supporting device for a slicing machine according to the invention. The support part supports the workpiece holding part, and the support part is provided with a moving means movable in the vertical direction perpendicular to the moving direction of the workpiece mounting part.

Then, by rotating the eccentric member, the workpiece holding part is moved in a horizontal direction perpendicular to the moving direction of the workpiece mounting part, and at the same time, the supporting part is moved in the vertical direction orthogonal to the moving direction of the workpiece mounting part by the moving means, and the workpiece is By raising and lowering the holding part to adjust the holding position, it is possible to stably hold the workpiece.

[Embodiment of the invention] Hereinafter, an embodiment of the invention will be described based on the drawings.

FIG. 1 is a side view of an entire slicing machine equipped with a workpiece support device for a slicing machine according to the present invention.

The slicing machine 100 includes a main shaft portion 10 that rotationally drives an annular blade 12 serving as a processing tool and moves up and down, and a workpiece mounting portion 20, which are disposed facing each other on a base 50.

In the main shaft section 10, an annular blade 12 attached to a rotating body 11 is rotationally driven by a main shaft motor 13, and the main shaft section 10 as a whole can be raised and lowered in the vertical direction by a lifting motor 14. Reference numeral 15 denotes a counterweight that balances the weight of the main shaft section 10 as it moves up and down, and is used to enable the main shaft section 10 to move up and down smoothly.

The work holding unit 20 includes a work mounting base 21 and a work supporting device 30 that holds the tip portion of the silicon ingot 1 as a work mounted on the work mounting base 21 from below, which are installed on a table 51. It is configured.

The workpiece mount 21 is installed so as to be movable back and forth on the table 51, and is driven to move back and forth by a feed motor 22 provided at the side end of the table 51. Further, the end surface on the main shaft part 10 side is formed with a workpiece mounting surface 21A parallel to the annular blade 12 of the main shaft part 10, and the rear end surface of the cylindrical silicon ingot 1 as a workpiece is attached thereto by adhesive. It is something that can be done.

The silicon ingot 1 has its rear end surface fixed to the workpiece mounting surface 21A of the workpiece mounting table 21 by adhesive, and its lower surface is held and stably supported by the workpiece support device 30 at its tip.

Then, the workpiece mounting table 2 is moved by the feed motor 22.
1 is driven forward by a predetermined amount, and the main shaft motor 1
3 rotates the annular blade 12 while the main shaft portion 10 is raised and lowered by the lifting motor 14 to slice the silicon ingot 1 into a predetermined thickness.

The work supporting device 30 is shown in a second enlarged side view.
As shown in FIG. 3, which is a diagram and a sectional view thereof, a work holding arm 31 as a work holding part for receiving a work, and an eccentric ring 3 as an eccentric member rotatably fitted to the work holding arm 31.
2. It is composed of a shaft 34 constituting a support part 33 that supports the work holding arm 31 and the eccentric ring 32 so as to be movable in the vertical direction, a screw ring 35 as a lifting means, a holder 36, and the like.

The holder 36 is fixed to the table 51 by a bracket arm 39, thereby being installed at a predetermined position.

The workpiece holding arm 31 has a substantially V-shape whose upper part is bifurcated, and bearings 31A, 31A, which are rotatable roller members that come into contact with the ingot 1, are provided at the upper ends of each of the arms.

The eccentric ring 32 has a large diameter operating portion 32 on the upper end side.
A and a small-diameter fitting portion 32B are formed on the lower side, and the outer periphery of the operating portion 32A is knurled, and the fitting hole 32C of the shaft 34 is offset from the center by a predetermined amount in the fitting portion 32B. (i.e., the fitting part 32
B is formed at a position offset by a predetermined amount (as shown in the fourth diagram).

The shaft 34 has a large-diameter flange 34A as its boundary, an upper end thereof having a fitting portion 34B that fits into the fitting hole 32C of the eccentric ring 32 described above, and a lower end thereof having a fitting portion 34C that fits into the screw ring 35. It is becoming.

The fitting portion 32B of the eccentric ring 32 is rotatably fitted into the fitting hole formed in the center of the work holding arm 31 via bearings 31B, 31C, and 31D, and the fitting hole 3 of the eccentric ring 32 is rotatably fitted into the fitting hole formed in the center of the work holding arm 31.
The fitting part 34B of the shaft 34 is fitted into the shaft 34, the center part of the work holding arm 31 is sandwiched between the collar part 34A of the shaft 34 and the operating part 32A of the eccentric ring 32, and the screw 41 passes through the operating part 32A. The eccentric ring 32 and the shaft 34 are fixed as one body. Moreover, the operation part 32 of the eccentric ring 32
A is provided with a set screw 42 passing through it at a predetermined position near the outer periphery, and by tightening this set screw 42 and tightening the upper surface of the work holding arm 31, the eccentric ring 32 becomes unable to rotate relative to the work holding arm 31. It is becoming fixed.

The fitting portion 34C on the lower end side of the shaft 34 is rotatably fitted with a screw ring 35 having a sealing member 35E, and an end collar 37 is secured to the lower end surface of the screw ring 35 to prevent the fitting portion 34C from falling off. It is fixed with screws 43.

The screw ring 35 has a large diameter operating part 35A at the upper end and a fitting part 35C at the lower end, and a threaded part 35B with a predetermined pitch between the operating part 35A and the fitting part 35C. A fitting hole 35D into which the shaft 34 fits is formed through the center. In addition, the operation section 35
The outer periphery of A is knurled.

The holder 36 has a cylindrical shape with a bottom, and a threaded portion 36A that is threadedly engaged with a threaded portion 35B of the screw ring 35 is formed on the inner peripheral edge of the upper opening.

The screw ring 35 is attached to the holder 36.
The end collar 37 is screwed into the threaded portion 36A on the upper edge and is installed in the holder 36 by fitting the outer periphery of the end collar 37 fixed to the lower end surface of the shaft 34 with the inner periphery of the holder 36.

A coil spring 38 is inserted between the bottom of the holder 36 and the end collar 37, and the length of the fitting portion 34C on the lower end side of the shaft 34 is longer than the entire thickness of the screw ring 35 by a predetermined amount. However, the shaft 34 is pushed upward by the pressing return force of the coil spring 38.

The length of the fitting portion 34C of the shaft 34 relative to the entire thickness of the screw ring 35 can be slid by deforming the coil spring 38 with a predetermined pressing force.
The tip of the silicon ingot 1 is applied with a predetermined force within the range of this extra stroke, and acts to prevent the silicon ingot 1 from being lifted more than necessary.

Further, a screw hole is formed through the holder 36 at a predetermined position on the side surface corresponding to the screw portion 36A, and the screw portion 35B of the screw ring 35 is tightened by tightening a set screw 44 that is threaded into the screw hole. As a result, the screw ring 35 is fixed to the holder 36 so as not to be relatively rotatable.

In the work supporting device 30 configured as described above, when the set screw 42 of the eccentric ring 32 is loosened and the eccentric ring 32 is rotated, the eccentric ring 3
2 is fixed integrally with the shaft 34, the shaft 34 rotates at the fitting part with the holder 36, and as a result, the eccentric ring 32 swings left and right by the amount of eccentricity. The work holding arm 31 to which the fitting portion 32B of the eccentric ring 32 is fitted also moves left and right.

Further, when the set screw 44 of the holder 36 is loosened and the screw ring 35 is rotated, the screwing position of the screw ring 35 with respect to the holder 36 changes (up and down) due to the rotation, and the lower end of the shaft 34 (end collar 37 ) is pressed against the lower end surface of the screw ring 35 by the coil spring 38, so the shaft 34 also moves up and down as the screw ring 35 moves up and down.
That is, the work holding arm 31 connected to the upper end of the shaft 34 is configured to move up and down.

If the diameter of the silicon ingot 1 bonded to the workpiece mounting surface 21A of the workpiece mounting base 21 is different or the bonding position is shifted,
A good supporting state can be obtained by adjusting as described below.

First, loosen the setscrew 42 of the eccentric ring 32 to enable the eccentric ring 32 to rotate.
By rotating the operating section 32A, the work holding arm 31 is moved left and right to align its center with the center of the silicon ingot 1.

Next, the screw ring 35 is made rotatable by loosening the set screw 44 of the holder 36, and the screw ring 35 is rotated.
The screwing position with respect to the holder 36 is moved up and down, and the bearings 31A, 3 at the tip of the work holding arm 31 are
1A is brought into contact with and pressed against the silicon ingot 1, and the tip of the silicon ingot 1 is held with a predetermined force by the work holding arm 31.

After that, tighten the setscrews 42 and 44 of the eccentric ring 32 and the holder 36, so that the eccentric ring 3
2 and the screw ring 35 are fixed so as not to rotate, it becomes possible to stably hold the silicon ingot 1.

[Effect of the invention] As described above, according to the workpiece support device of the slicing machine according to the invention, even if the diameter of the ingot is different or the position of adhesion of the ingot to the workpiece mounting part is shifted, it can be easily adjusted. It is possible to obtain a work holding state that is suitable for the workpiece.

Therefore, there is no need to replace the workpiece support member to match the diameter of the workpiece, or to adhere the workpiece to the workpiece mounting portion with high precision, resulting in good workability and efficient workmanship.

[Brief explanation of the drawing]

Fig. 1 is a side view of the entire slicing machine that employs the workpiece support device of the slicing machine according to the present invention, Fig. 2 is a side view of one embodiment of the workpiece support device, Fig. 3 is its cross-sectional view, and Fig. 4 The figure is a - sectional view of FIG. 1...Silicon ingot (work), 31...
...Work holding arm (work holding part), 32...
Eccentric ring (eccentric member), 33...support part.

Claims (1)

[Scope of utility model registration request] A slicing machine that supports a processing section at the tip of the workpiece in a slicing machine that has a rotating circular cutting tool and a workpiece mounting section that holds the workpiece and can move the workpiece relatively in a direction perpendicular to the cutting tool. a workpiece holding part that receives the workpiece; an eccentric member rotatably fitted to the workpiece holding part and eccentric with respect to the rotation center of the workpiece holding part; and a workpiece holding part that is connected to the workpiece holding part via the eccentric member. and a support part that supports the workpiece mounting part, and the support part is provided with a moving means that is movable in the vertical direction orthogonal to the moving direction of the workpiece mounting part;
A workpiece support device for a slicing machine featuring: