JPS62103378A - Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法 - Google Patents

Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法

Info

Publication number
JPS62103378A
JPS62103378A JP24366185A JP24366185A JPS62103378A JP S62103378 A JPS62103378 A JP S62103378A JP 24366185 A JP24366185 A JP 24366185A JP 24366185 A JP24366185 A JP 24366185A JP S62103378 A JPS62103378 A JP S62103378A
Authority
JP
Japan
Prior art keywords
vacuum chamber
dry etching
lid
cvd
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24366185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6345466B2 (enExample
Inventor
Yutaka Kato
豊 加藤
Eizo Isoyama
礒山　永三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP24366185A priority Critical patent/JPS62103378A/ja
Publication of JPS62103378A publication Critical patent/JPS62103378A/ja
Publication of JPS6345466B2 publication Critical patent/JPS6345466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP24366185A 1985-10-29 1985-10-29 Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法 Granted JPS62103378A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24366185A JPS62103378A (ja) 1985-10-29 1985-10-29 Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24366185A JPS62103378A (ja) 1985-10-29 1985-10-29 Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法

Publications (2)

Publication Number Publication Date
JPS62103378A true JPS62103378A (ja) 1987-05-13
JPS6345466B2 JPS6345466B2 (enExample) 1988-09-09

Family

ID=17107122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24366185A Granted JPS62103378A (ja) 1985-10-29 1985-10-29 Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法

Country Status (1)

Country Link
JP (1) JPS62103378A (enExample)

Also Published As

Publication number Publication date
JPS6345466B2 (enExample) 1988-09-09

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