JPS62101859U - - Google Patents
Info
- Publication number
- JPS62101859U JPS62101859U JP19145885U JP19145885U JPS62101859U JP S62101859 U JPS62101859 U JP S62101859U JP 19145885 U JP19145885 U JP 19145885U JP 19145885 U JP19145885 U JP 19145885U JP S62101859 U JPS62101859 U JP S62101859U
- Authority
- JP
- Japan
- Prior art keywords
- reactive gas
- evaporation source
- ionization
- ion plating
- plating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000007733 ion plating Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19145885U JPS62101859U (sv) | 1985-12-12 | 1985-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19145885U JPS62101859U (sv) | 1985-12-12 | 1985-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62101859U true JPS62101859U (sv) | 1987-06-29 |
Family
ID=31145620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19145885U Pending JPS62101859U (sv) | 1985-12-12 | 1985-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62101859U (sv) |
-
1985
- 1985-12-12 JP JP19145885U patent/JPS62101859U/ja active Pending
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