JPS6422772U - - Google Patents
Info
- Publication number
- JPS6422772U JPS6422772U JP11566487U JP11566487U JPS6422772U JP S6422772 U JPS6422772 U JP S6422772U JP 11566487 U JP11566487 U JP 11566487U JP 11566487 U JP11566487 U JP 11566487U JP S6422772 U JPS6422772 U JP S6422772U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- sample stage
- substrate
- processing apparatus
- notch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 238000009832 plasma treatment Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987115664U JPH0714363Y2 (ja) | 1987-07-28 | 1987-07-28 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987115664U JPH0714363Y2 (ja) | 1987-07-28 | 1987-07-28 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6422772U true JPS6422772U (sv) | 1989-02-06 |
| JPH0714363Y2 JPH0714363Y2 (ja) | 1995-04-05 |
Family
ID=31357525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987115664U Expired - Lifetime JPH0714363Y2 (ja) | 1987-07-28 | 1987-07-28 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0714363Y2 (sv) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61123128A (ja) * | 1984-11-07 | 1986-06-11 | Fujitsu Ltd | プラズマ反応装置 |
-
1987
- 1987-07-28 JP JP1987115664U patent/JPH0714363Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61123128A (ja) * | 1984-11-07 | 1986-06-11 | Fujitsu Ltd | プラズマ反応装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0714363Y2 (ja) | 1995-04-05 |