JPH01120328U - - Google Patents
Info
- Publication number
- JPH01120328U JPH01120328U JP1532488U JP1532488U JPH01120328U JP H01120328 U JPH01120328 U JP H01120328U JP 1532488 U JP1532488 U JP 1532488U JP 1532488 U JP1532488 U JP 1532488U JP H01120328 U JPH01120328 U JP H01120328U
- Authority
- JP
- Japan
- Prior art keywords
- processing space
- processing
- thermal spray
- samples
- faces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005507 spraying Methods 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 238000001020 plasma etching Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1532488U JPH01120328U (sv) | 1988-02-08 | 1988-02-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1532488U JPH01120328U (sv) | 1988-02-08 | 1988-02-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01120328U true JPH01120328U (sv) | 1989-08-15 |
Family
ID=31227276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1532488U Pending JPH01120328U (sv) | 1988-02-08 | 1988-02-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01120328U (sv) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04363021A (ja) * | 1991-02-08 | 1992-12-15 | Sumitomo Metal Ind Ltd | プラズマプロセス装置 |
JP2007332462A (ja) * | 2000-12-12 | 2007-12-27 | Tokyo Electron Ltd | プラズマ処理装置の再生方法,プラズマ処理容器内部材,プラズマ処理容器内部材の製造方法及びプラズマ処理装置 |
US8877002B2 (en) | 2002-11-28 | 2014-11-04 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63281430A (ja) * | 1987-05-14 | 1988-11-17 | Matsushita Electric Ind Co Ltd | ドライエッチング装置の電極構造 |
JPS6439728A (en) * | 1987-08-05 | 1989-02-10 | Mitsubishi Electric Corp | Manufacture of semiconductor by plasma reaction |
-
1988
- 1988-02-08 JP JP1532488U patent/JPH01120328U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63281430A (ja) * | 1987-05-14 | 1988-11-17 | Matsushita Electric Ind Co Ltd | ドライエッチング装置の電極構造 |
JPS6439728A (en) * | 1987-08-05 | 1989-02-10 | Mitsubishi Electric Corp | Manufacture of semiconductor by plasma reaction |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04363021A (ja) * | 1991-02-08 | 1992-12-15 | Sumitomo Metal Ind Ltd | プラズマプロセス装置 |
JP2007332462A (ja) * | 2000-12-12 | 2007-12-27 | Tokyo Electron Ltd | プラズマ処理装置の再生方法,プラズマ処理容器内部材,プラズマ処理容器内部材の製造方法及びプラズマ処理装置 |
US8877002B2 (en) | 2002-11-28 | 2014-11-04 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0167739U (sv) | ||
JPH02135141U (sv) | ||
JPH01120328U (sv) | ||
JPS63128724U (sv) | ||
JPS61136537U (sv) | ||
JPS5789243A (en) | Fabrication of semiconductor device | |
JPS62107439U (sv) | ||
JPS6373359U (sv) | ||
JPH0272530U (sv) | ||
JPS6420627A (en) | Manufacture of semiconductor wafer | |
JPS6327035U (sv) | ||
JPS6334164U (sv) | ||
JPH01147258U (sv) | ||
JPH0165131U (sv) | ||
JPH0249710Y2 (sv) | ||
JPS6442568A (en) | Device for producing thin compound film | |
JPS55115347A (en) | Semiconductor device | |
JPH0456332U (sv) | ||
JPH0385466U (sv) | ||
JPH031531U (sv) | ||
JPS62191862U (sv) | ||
JPS6373355U (sv) | ||
JPH01106564U (sv) | ||
JPS63123667U (sv) | ||
JPH0374665U (sv) |