JPS62101229U - - Google Patents

Info

Publication number
JPS62101229U
JPS62101229U JP19107685U JP19107685U JPS62101229U JP S62101229 U JPS62101229 U JP S62101229U JP 19107685 U JP19107685 U JP 19107685U JP 19107685 U JP19107685 U JP 19107685U JP S62101229 U JPS62101229 U JP S62101229U
Authority
JP
Japan
Prior art keywords
wafer
rotary disk
holder
disk
pick member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19107685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19107685U priority Critical patent/JPS62101229U/ja
Publication of JPS62101229U publication Critical patent/JPS62101229U/ja
Pending legal-status Critical Current

Links

JP19107685U 1985-12-13 1985-12-13 Pending JPS62101229U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19107685U JPS62101229U (enrdf_load_stackoverflow) 1985-12-13 1985-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19107685U JPS62101229U (enrdf_load_stackoverflow) 1985-12-13 1985-12-13

Publications (1)

Publication Number Publication Date
JPS62101229U true JPS62101229U (enrdf_load_stackoverflow) 1987-06-27

Family

ID=31144884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19107685U Pending JPS62101229U (enrdf_load_stackoverflow) 1985-12-13 1985-12-13

Country Status (1)

Country Link
JP (1) JPS62101229U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397375A (en) * 1977-02-07 1978-08-25 Nissin Electric Co Ltd Device for producing semiconductor
JPS5431271A (en) * 1977-08-13 1979-03-08 Nissin Electric Co Ltd Wafer holder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397375A (en) * 1977-02-07 1978-08-25 Nissin Electric Co Ltd Device for producing semiconductor
JPS5431271A (en) * 1977-08-13 1979-03-08 Nissin Electric Co Ltd Wafer holder

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