JPS5431271A - Wafer holder - Google Patents

Wafer holder

Info

Publication number
JPS5431271A
JPS5431271A JP9711577A JP9711577A JPS5431271A JP S5431271 A JPS5431271 A JP S5431271A JP 9711577 A JP9711577 A JP 9711577A JP 9711577 A JP9711577 A JP 9711577A JP S5431271 A JPS5431271 A JP S5431271A
Authority
JP
Japan
Prior art keywords
wafer holder
wafer
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9711577A
Other languages
Japanese (ja)
Other versions
JPS5928940B2 (en
Inventor
Masayuki Isei
Tsuneo Hiramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP9711577A priority Critical patent/JPS5928940B2/en
Publication of JPS5431271A publication Critical patent/JPS5431271A/en
Publication of JPS5928940B2 publication Critical patent/JPS5928940B2/en
Expired legal-status Critical Current

Links

JP9711577A 1977-08-13 1977-08-13 Wafer holding device Expired JPS5928940B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9711577A JPS5928940B2 (en) 1977-08-13 1977-08-13 Wafer holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9711577A JPS5928940B2 (en) 1977-08-13 1977-08-13 Wafer holding device

Publications (2)

Publication Number Publication Date
JPS5431271A true JPS5431271A (en) 1979-03-08
JPS5928940B2 JPS5928940B2 (en) 1984-07-17

Family

ID=14183563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9711577A Expired JPS5928940B2 (en) 1977-08-13 1977-08-13 Wafer holding device

Country Status (1)

Country Link
JP (1) JPS5928940B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597627A (en) * 1982-07-05 1984-01-14 Matsushita Electric Works Ltd Pillar volume mounting device
JPS62101229U (en) * 1985-12-13 1987-06-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597627A (en) * 1982-07-05 1984-01-14 Matsushita Electric Works Ltd Pillar volume mounting device
JPS62101229U (en) * 1985-12-13 1987-06-27

Also Published As

Publication number Publication date
JPS5928940B2 (en) 1984-07-17

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