JPS5397375A - Device for producing semiconductor - Google Patents

Device for producing semiconductor

Info

Publication number
JPS5397375A
JPS5397375A JP1226377A JP1226377A JPS5397375A JP S5397375 A JPS5397375 A JP S5397375A JP 1226377 A JP1226377 A JP 1226377A JP 1226377 A JP1226377 A JP 1226377A JP S5397375 A JPS5397375 A JP S5397375A
Authority
JP
Japan
Prior art keywords
producing semiconductor
semiconductor
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1226377A
Other languages
Japanese (ja)
Other versions
JPS5935505B2 (en
Inventor
Masayuki Isei
Tsuneo Hiramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1226377A priority Critical patent/JPS5935505B2/en
Publication of JPS5397375A publication Critical patent/JPS5397375A/en
Publication of JPS5935505B2 publication Critical patent/JPS5935505B2/en
Expired legal-status Critical Current

Links

JP1226377A 1977-02-07 1977-02-07 Semiconductor device manufacturing equipment Expired JPS5935505B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1226377A JPS5935505B2 (en) 1977-02-07 1977-02-07 Semiconductor device manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1226377A JPS5935505B2 (en) 1977-02-07 1977-02-07 Semiconductor device manufacturing equipment

Publications (2)

Publication Number Publication Date
JPS5397375A true JPS5397375A (en) 1978-08-25
JPS5935505B2 JPS5935505B2 (en) 1984-08-29

Family

ID=11800475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1226377A Expired JPS5935505B2 (en) 1977-02-07 1977-02-07 Semiconductor device manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS5935505B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142752A (en) * 1984-12-14 1986-06-30 Nec Corp Wafer holder of ion implanting apparatus
JPS62101229U (en) * 1985-12-13 1987-06-27
JPH01176648A (en) * 1987-12-30 1989-07-13 Teru Barian Kk Base board holder driving mechanism for ion implantation device
JPH025863U (en) * 1988-06-25 1990-01-16

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60242242A (en) * 1984-05-14 1985-12-02 元旦ビユーティ工業株式会社 Face plate end part water-tight apparatus of building
JPS6321303U (en) * 1986-07-26 1988-02-12

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142752A (en) * 1984-12-14 1986-06-30 Nec Corp Wafer holder of ion implanting apparatus
JPS62101229U (en) * 1985-12-13 1987-06-27
JPH01176648A (en) * 1987-12-30 1989-07-13 Teru Barian Kk Base board holder driving mechanism for ion implantation device
JPH025863U (en) * 1988-06-25 1990-01-16

Also Published As

Publication number Publication date
JPS5935505B2 (en) 1984-08-29

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