JPH0246361U - - Google Patents

Info

Publication number
JPH0246361U
JPH0246361U JP12480188U JP12480188U JPH0246361U JP H0246361 U JPH0246361 U JP H0246361U JP 12480188 U JP12480188 U JP 12480188U JP 12480188 U JP12480188 U JP 12480188U JP H0246361 U JPH0246361 U JP H0246361U
Authority
JP
Japan
Prior art keywords
ions
semiconductor wafer
wafer holder
wafer
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12480188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12480188U priority Critical patent/JPH0246361U/ja
Publication of JPH0246361U publication Critical patent/JPH0246361U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12480188U 1988-09-24 1988-09-24 Pending JPH0246361U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12480188U JPH0246361U (enrdf_load_stackoverflow) 1988-09-24 1988-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12480188U JPH0246361U (enrdf_load_stackoverflow) 1988-09-24 1988-09-24

Publications (1)

Publication Number Publication Date
JPH0246361U true JPH0246361U (enrdf_load_stackoverflow) 1990-03-29

Family

ID=31374847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12480188U Pending JPH0246361U (enrdf_load_stackoverflow) 1988-09-24 1988-09-24

Country Status (1)

Country Link
JP (1) JPH0246361U (enrdf_load_stackoverflow)

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