JPS62100835U - - Google Patents

Info

Publication number
JPS62100835U
JPS62100835U JP19381985U JP19381985U JPS62100835U JP S62100835 U JPS62100835 U JP S62100835U JP 19381985 U JP19381985 U JP 19381985U JP 19381985 U JP19381985 U JP 19381985U JP S62100835 U JPS62100835 U JP S62100835U
Authority
JP
Japan
Prior art keywords
attracted
suction surface
vacuum chuck
elastic body
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19381985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0243638Y2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985193819U priority Critical patent/JPH0243638Y2/ja
Publication of JPS62100835U publication Critical patent/JPS62100835U/ja
Application granted granted Critical
Publication of JPH0243638Y2 publication Critical patent/JPH0243638Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1985193819U 1985-12-16 1985-12-16 Expired JPH0243638Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985193819U JPH0243638Y2 (it) 1985-12-16 1985-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985193819U JPH0243638Y2 (it) 1985-12-16 1985-12-16

Publications (2)

Publication Number Publication Date
JPS62100835U true JPS62100835U (it) 1987-06-26
JPH0243638Y2 JPH0243638Y2 (it) 1990-11-20

Family

ID=31150199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985193819U Expired JPH0243638Y2 (it) 1985-12-16 1985-12-16

Country Status (1)

Country Link
JP (1) JPH0243638Y2 (it)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312948A (ja) * 1989-06-12 1991-01-21 Nikon Corp 基板ホルダ
JPH11307619A (ja) * 1998-04-20 1999-11-05 Yamatake Corp ウエハ固定装置
JPH11309638A (ja) * 1998-04-28 1999-11-09 Kyocera Corp 真空吸着盤
JP2017220483A (ja) * 2016-06-03 2017-12-14 日本特殊陶業株式会社 真空チャック及び真空チャックの製造方法
WO2019049596A1 (ja) * 2017-09-07 2019-03-14 Ｓｔｓ合同会社 取付具

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54164982U (it) * 1978-05-11 1979-11-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54164982U (it) * 1978-05-11 1979-11-19

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312948A (ja) * 1989-06-12 1991-01-21 Nikon Corp 基板ホルダ
JPH11307619A (ja) * 1998-04-20 1999-11-05 Yamatake Corp ウエハ固定装置
JPH11309638A (ja) * 1998-04-28 1999-11-09 Kyocera Corp 真空吸着盤
JP2017220483A (ja) * 2016-06-03 2017-12-14 日本特殊陶業株式会社 真空チャック及び真空チャックの製造方法
WO2019049596A1 (ja) * 2017-09-07 2019-03-14 Ｓｔｓ合同会社 取付具

Also Published As

Publication number Publication date
JPH0243638Y2 (it) 1990-11-20

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