JPS62100835U - - Google Patents

Info

Publication number
JPS62100835U
JPS62100835U JP19381985U JP19381985U JPS62100835U JP S62100835 U JPS62100835 U JP S62100835U JP 19381985 U JP19381985 U JP 19381985U JP 19381985 U JP19381985 U JP 19381985U JP S62100835 U JPS62100835 U JP S62100835U
Authority
JP
Japan
Prior art keywords
attracted
suction surface
vacuum chuck
elastic body
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19381985U
Other languages
Japanese (ja)
Other versions
JPH0243638Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985193819U priority Critical patent/JPH0243638Y2/ja
Publication of JPS62100835U publication Critical patent/JPS62100835U/ja
Application granted granted Critical
Publication of JPH0243638Y2 publication Critical patent/JPH0243638Y2/ja
Expired legal-status Critical Current

Links

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  • Jigs For Machine Tools (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例である真空チヤツク
の概略を示す縦断面図、第２図は同真空チヤツク
のアツパーチヤツクの平面図、第３図は同真空チ
ヤツクのボトムチヤツクの平面図、第４図は同真
空チヤツクに対して被吸着物を吸引させたところ
を示す断面説明図、第５図は従来の真空チヤツク
の縦断面図、第６図は従来の真空チヤツクに被吸
着物を吸引させたところを示す断面説明図をそれ
ぞれ示している。 １１…吸着面、２３…逃げ部、３０…弾性体、
４０…被吸着物。 Fig. 1 is a longitudinal sectional view schematically showing a vacuum chuck as an embodiment of the present invention, Fig. 2 is a plan view of the top chuck of the same vacuum chuck, Fig. 3 is a plan view of the bottom chuck of the same vacuum chuck, and Fig. 4 is a plan view of the bottom chuck of the same vacuum chuck. The figure is an explanatory cross-sectional view showing the same vacuum chuck with an object being sucked into it, Figure 5 is a vertical cross-sectional view of a conventional vacuum chuck, and Figure 6 is a conventional vacuum chuck with an object being sucked into it. The cross-sectional explanatory drawings showing the parts are shown respectively. DESCRIPTION OF SYMBOLS 11... Adsorption surface, 23... Relief part, 30... Elastic body,
40...Adsorbed object.

Claims (1)

【実用新案登録請求の範囲】 被吸着物が吸着される吸着面よりも上方に突出
する弾性体と、 前記被吸着物を前記吸着面に吸引したとき、前
記弾性体の上端が被吸着物に押されて変形して前
記吸着面と面一になるための逃がし部とを備えた
ことを特徴とする真空チヤツク。[Claims for Utility Model Registration] An elastic body that protrudes above a suction surface on which an object to be attracted is attracted, and when the object to be attracted is attracted to the suction surface, the upper end of the elastic body is attached to the object to be attracted. A vacuum chuck comprising a relief part that is deformed by being pushed and becomes flush with the suction surface.
JP1985193819U 1985-12-16 1985-12-16 Expired JPH0243638Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985193819U JPH0243638Y2 (en) 1985-12-16 1985-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985193819U JPH0243638Y2 (en) 1985-12-16 1985-12-16

Publications (2)

Publication Number Publication Date
JPS62100835U true JPS62100835U (en) 1987-06-26
JPH0243638Y2 JPH0243638Y2 (en) 1990-11-20

Family

ID=31150199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985193819U Expired JPH0243638Y2 (en) 1985-12-16 1985-12-16

Country Status (1)

Country Link
JP (1) JPH0243638Y2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312948A (en) * 1989-06-12 1991-01-21 Nikon Corp Substrate holder
JPH11307619A (en) * 1998-04-20 1999-11-05 Yamatake Corp Wafer fixing device
JPH11309638A (en) * 1998-04-28 1999-11-09 Kyocera Corp Vacuum suction pad
JP2017220483A (en) * 2016-06-03 2017-12-14 日本特殊陶業株式会社 Vacuum chuck and manufacturing method of vacuum chuck
WO2019049596A1 (en) * 2017-09-07 2019-03-14 Ｓｔｓ合同会社 Attachment tool

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54164982U (en) * 1978-05-11 1979-11-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54164982U (en) * 1978-05-11 1979-11-19

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312948A (en) * 1989-06-12 1991-01-21 Nikon Corp Substrate holder
JPH11307619A (en) * 1998-04-20 1999-11-05 Yamatake Corp Wafer fixing device
JPH11309638A (en) * 1998-04-28 1999-11-09 Kyocera Corp Vacuum suction pad
JP2017220483A (en) * 2016-06-03 2017-12-14 日本特殊陶業株式会社 Vacuum chuck and manufacturing method of vacuum chuck
WO2019049596A1 (en) * 2017-09-07 2019-03-14 Ｓｔｓ合同会社 Attachment tool

Also Published As

Publication number Publication date
JPH0243638Y2 (en) 1990-11-20

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