JPS6197840U - - Google Patents

Info

Publication number
JPS6197840U
JPS6197840U JP18405284U JP18405284U JPS6197840U JP S6197840 U JPS6197840 U JP S6197840U JP 18405284 U JP18405284 U JP 18405284U JP 18405284 U JP18405284 U JP 18405284U JP S6197840 U JPS6197840 U JP S6197840U
Authority
JP
Japan
Prior art keywords
container
inspected
wafer
probe card
vertical movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18405284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18405284U priority Critical patent/JPS6197840U/ja
Publication of JPS6197840U publication Critical patent/JPS6197840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP18405284U 1984-12-04 1984-12-04 Pending JPS6197840U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18405284U JPS6197840U (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18405284U JPS6197840U (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Publications (1)

Publication Number Publication Date
JPS6197840U true JPS6197840U (enrdf_load_stackoverflow) 1986-06-23

Family

ID=30741539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18405284U Pending JPS6197840U (enrdf_load_stackoverflow) 1984-12-04 1984-12-04

Country Status (1)

Country Link
JP (1) JPS6197840U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022939A (ja) * 1988-06-13 1990-01-08 Tokyo Electron Ltd プローブ装置および検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022939A (ja) * 1988-06-13 1990-01-08 Tokyo Electron Ltd プローブ装置および検査方法

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