JPS61129339U - - Google Patents

Info

Publication number
JPS61129339U
JPS61129339U JP1268185U JP1268185U JPS61129339U JP S61129339 U JPS61129339 U JP S61129339U JP 1268185 U JP1268185 U JP 1268185U JP 1268185 U JP1268185 U JP 1268185U JP S61129339 U JPS61129339 U JP S61129339U
Authority
JP
Japan
Prior art keywords
microscope
move
autoprober
probe
probe card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1268185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1268185U priority Critical patent/JPS61129339U/ja
Publication of JPS61129339U publication Critical patent/JPS61129339U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1268185U 1985-01-31 1985-01-31 Pending JPS61129339U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1268185U JPS61129339U (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1268185U JPS61129339U (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Publications (1)

Publication Number Publication Date
JPS61129339U true JPS61129339U (enrdf_load_stackoverflow) 1986-08-13

Family

ID=30495977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1268185U Pending JPS61129339U (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Country Status (1)

Country Link
JP (1) JPS61129339U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0273163A (ja) * 1988-09-09 1990-03-13 Tokyo Electron Ltd プローブ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0273163A (ja) * 1988-09-09 1990-03-13 Tokyo Electron Ltd プローブ装置

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