JPS6197628U - - Google Patents

Info

Publication number
JPS6197628U
JPS6197628U JP18387884U JP18387884U JPS6197628U JP S6197628 U JPS6197628 U JP S6197628U JP 18387884 U JP18387884 U JP 18387884U JP 18387884 U JP18387884 U JP 18387884U JP S6197628 U JPS6197628 U JP S6197628U
Authority
JP
Japan
Prior art keywords
bearing
movable plate
concave portion
actuator
gas bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18387884U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18387884U priority Critical patent/JPS6197628U/ja
Publication of JPS6197628U publication Critical patent/JPS6197628U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Vibration Prevention Devices (AREA)

Description

【図面の簡単な説明】
第1図は本考案に係る静圧気体軸受の一実施例
を示す構成図、第2図は従来の軸受の構成図であ
る。 2…静圧気体軸受、21…パツド、22…軸受
面、23…凹部、31…オリフイス、4…アクチ
エータ、41…圧力センサー、5…ポケツト、3
…可動板。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 軸受面の凹部に対し、オリフイスを有す可
    動板および該可動板を凹部の深さ方向に変位する
    アクチエータを配備してなる静圧気体軸受。 (2) アクチエータは電圧印加により膨脹、収縮
    する圧電素子であつて、軸受にかかる負荷を検出
    する圧力センサーにて駆動制御される実用新案登
    録請求の範囲第1項記載の静圧気体軸受。
JP18387884U 1984-12-03 1984-12-03 Pending JPS6197628U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18387884U JPS6197628U (ja) 1984-12-03 1984-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18387884U JPS6197628U (ja) 1984-12-03 1984-12-03

Publications (1)

Publication Number Publication Date
JPS6197628U true JPS6197628U (ja) 1986-06-23

Family

ID=30741368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18387884U Pending JPS6197628U (ja) 1984-12-03 1984-12-03

Country Status (1)

Country Link
JP (1) JPS6197628U (ja)

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