JPS6196347U - - Google Patents
Info
- Publication number
- JPS6196347U JPS6196347U JP18204184U JP18204184U JPS6196347U JP S6196347 U JPS6196347 U JP S6196347U JP 18204184 U JP18204184 U JP 18204184U JP 18204184 U JP18204184 U JP 18204184U JP S6196347 U JPS6196347 U JP S6196347U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- pressure gauges
- semiconductor
- output voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18204184U JPH041472Y2 (US06265458-20010724-C00056.png) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18204184U JPH041472Y2 (US06265458-20010724-C00056.png) | 1984-11-30 | 1984-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6196347U true JPS6196347U (US06265458-20010724-C00056.png) | 1986-06-20 |
| JPH041472Y2 JPH041472Y2 (US06265458-20010724-C00056.png) | 1992-01-20 |
Family
ID=30739577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18204184U Expired JPH041472Y2 (US06265458-20010724-C00056.png) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH041472Y2 (US06265458-20010724-C00056.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013205403A (ja) * | 2012-03-29 | 2013-10-07 | Toshiba Corp | 圧力センサ及びマイクロフォン |
| JP2015064375A (ja) * | 2014-12-04 | 2015-04-09 | 株式会社東芝 | 圧力センサ及びマイクロフォン |
| JP2017058340A (ja) * | 2015-09-18 | 2017-03-23 | Smc株式会社 | 圧力センサ及びその製造方法 |
| US10067021B2 (en) | 2015-09-18 | 2018-09-04 | Smc Corporation | Pressure sensor having resistive bodies |
-
1984
- 1984-11-30 JP JP18204184U patent/JPH041472Y2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013205403A (ja) * | 2012-03-29 | 2013-10-07 | Toshiba Corp | 圧力センサ及びマイクロフォン |
| US9759618B2 (en) | 2012-03-29 | 2017-09-12 | Kabushiki Kaisha Toshiba | Pressure sensor and microphone |
| US10082430B2 (en) | 2012-03-29 | 2018-09-25 | Kabushiki Kaisha Toshiba | Pressure sensor and microphone |
| JP2015064375A (ja) * | 2014-12-04 | 2015-04-09 | 株式会社東芝 | 圧力センサ及びマイクロフォン |
| JP2017058340A (ja) * | 2015-09-18 | 2017-03-23 | Smc株式会社 | 圧力センサ及びその製造方法 |
| US10048147B2 (en) | 2015-09-18 | 2018-08-14 | Smc Corporation | Pressure sensor including a thin-film diaphragm provided with plural resistive bodies printed in a straight line and manufacturing method therefor |
| US10067021B2 (en) | 2015-09-18 | 2018-09-04 | Smc Corporation | Pressure sensor having resistive bodies |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH041472Y2 (US06265458-20010724-C00056.png) | 1992-01-20 |
