JPS6194367A - 半導体装置及び半導体装置の製造方法 - Google Patents

半導体装置及び半導体装置の製造方法

Info

Publication number
JPS6194367A
JPS6194367A JP59215155A JP21515584A JPS6194367A JP S6194367 A JPS6194367 A JP S6194367A JP 59215155 A JP59215155 A JP 59215155A JP 21515584 A JP21515584 A JP 21515584A JP S6194367 A JPS6194367 A JP S6194367A
Authority
JP
Japan
Prior art keywords
gate
island
oxide film
film
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59215155A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546706B2 (OSRAM
Inventor
Kohei Ebara
江原　孝平
Hideyuki Unno
秀之 海野
Susumu Muramoto
村本　進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59215155A priority Critical patent/JPS6194367A/ja
Publication of JPS6194367A publication Critical patent/JPS6194367A/ja
Publication of JPH0546706B2 publication Critical patent/JPH0546706B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H10D30/6744—Monocrystalline silicon

Landscapes

  • Element Separation (AREA)
JP59215155A 1984-10-16 1984-10-16 半導体装置及び半導体装置の製造方法 Granted JPS6194367A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59215155A JPS6194367A (ja) 1984-10-16 1984-10-16 半導体装置及び半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59215155A JPS6194367A (ja) 1984-10-16 1984-10-16 半導体装置及び半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6194367A true JPS6194367A (ja) 1986-05-13
JPH0546706B2 JPH0546706B2 (OSRAM) 1993-07-14

Family

ID=16667572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59215155A Granted JPS6194367A (ja) 1984-10-16 1984-10-16 半導体装置及び半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6194367A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5412240A (en) * 1992-01-31 1995-05-02 Canon Kabushiki Kaisha Silicon-on-insulator CMOS device and a liquid crystal display with controlled base insulator thickness
US5434441A (en) * 1992-01-31 1995-07-18 Canon Kabushiki Kaisha Silicon-on-insulator CMOS device and a liquid crystal display with controlled base insulator thickness
US6358815B2 (en) 1999-04-26 2002-03-19 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and method of manufacturing the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317286A (en) * 1976-07-31 1978-02-17 Matsushita Electric Ind Co Ltd Production of semiconductor device
JPS57113252A (en) * 1980-12-29 1982-07-14 Seiko Epson Corp Manufacture of semiconductor device
JPS57167677A (en) * 1981-03-31 1982-10-15 Fujitsu Ltd Semiconductor device and manufacture thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317286A (en) * 1976-07-31 1978-02-17 Matsushita Electric Ind Co Ltd Production of semiconductor device
JPS57113252A (en) * 1980-12-29 1982-07-14 Seiko Epson Corp Manufacture of semiconductor device
JPS57167677A (en) * 1981-03-31 1982-10-15 Fujitsu Ltd Semiconductor device and manufacture thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5412240A (en) * 1992-01-31 1995-05-02 Canon Kabushiki Kaisha Silicon-on-insulator CMOS device and a liquid crystal display with controlled base insulator thickness
US5434441A (en) * 1992-01-31 1995-07-18 Canon Kabushiki Kaisha Silicon-on-insulator CMOS device and a liquid crystal display with controlled base insulator thickness
US6358815B2 (en) 1999-04-26 2002-03-19 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and method of manufacturing the same

Also Published As

Publication number Publication date
JPH0546706B2 (OSRAM) 1993-07-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term