JPS6193546A - エネルギ分析装置 - Google Patents

エネルギ分析装置

Info

Publication number
JPS6193546A
JPS6193546A JP59214652A JP21465284A JPS6193546A JP S6193546 A JPS6193546 A JP S6193546A JP 59214652 A JP59214652 A JP 59214652A JP 21465284 A JP21465284 A JP 21465284A JP S6193546 A JPS6193546 A JP S6193546A
Authority
JP
Japan
Prior art keywords
energy
sweep
analyzer
mode
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59214652A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0358143B2 (OSRAM
Inventor
Sumio Sasaki
澄夫 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP59214652A priority Critical patent/JPS6193546A/ja
Publication of JPS6193546A publication Critical patent/JPS6193546A/ja
Publication of JPH0358143B2 publication Critical patent/JPH0358143B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP59214652A 1984-10-13 1984-10-13 エネルギ分析装置 Granted JPS6193546A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59214652A JPS6193546A (ja) 1984-10-13 1984-10-13 エネルギ分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59214652A JPS6193546A (ja) 1984-10-13 1984-10-13 エネルギ分析装置

Publications (2)

Publication Number Publication Date
JPS6193546A true JPS6193546A (ja) 1986-05-12
JPH0358143B2 JPH0358143B2 (OSRAM) 1991-09-04

Family

ID=16659308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59214652A Granted JPS6193546A (ja) 1984-10-13 1984-10-13 エネルギ分析装置

Country Status (1)

Country Link
JP (1) JPS6193546A (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546421A (en) * 1978-09-29 1980-04-01 Hitachi Ltd Mass spectrometer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546421A (en) * 1978-09-29 1980-04-01 Hitachi Ltd Mass spectrometer

Also Published As

Publication number Publication date
JPH0358143B2 (OSRAM) 1991-09-04

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