JPS619252U - polishing equipment - Google Patents
polishing equipmentInfo
- Publication number
- JPS619252U JPS619252U JP1984091503U JP9150384U JPS619252U JP S619252 U JPS619252 U JP S619252U JP 1984091503 U JP1984091503 U JP 1984091503U JP 9150384 U JP9150384 U JP 9150384U JP S619252 U JPS619252 U JP S619252U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- holder
- holding rod
- polishing equipment
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【図面の簡単な説明】
第１図は従来用いられている研摩装置の一例を示す断面
図である。
第２図は本考案の研摩装置に用いた研摩ホルダ及びその
保持部を示す断面図である。
図において、１は本体、２は研摩皿、３は研摩クロス、
４は研摩ホルダ、５は半導体基板、６は保持棒、７はア
ーム、８はおもり、９は上部保持棒、１０はベアリング
、１１は下部保持棒を示す。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing an example of a conventional polishing device. FIG. 2 is a sectional view showing the polishing holder and its holding portion used in the polishing apparatus of the present invention. In the figure, 1 is the main body, 2 is the polishing plate, 3 is the polishing cloth,
4 is a polishing holder, 5 is a semiconductor substrate, 6 is a holding rod, 7 is an arm, 8 is a weight, 9 is an upper holding rod, 10 is a bearing, and 11 is a lower holding rod.
Claims (1)
保持し、研摩皿と被研摩物の摩擦により被研摩物を従動
回転させて研摩加工を行なう装置において、ホルダを支
える第１の保持棒と、前記第１の保持棒の同軸上に位置
し、前記第１の保持棒を回転自在に保持する第２の保持
棒とを含み構成されることを特徴とする研摩装置。In a device that holds a holder to which an object to be polished is adhered opposite a rotating polishing plate, and performs polishing by rotating the object due to friction between the polishing plate and the object, the first holder supports the holder. A polishing device comprising: a rod; and a second holding rod, which is located coaxially with the first holding rod and rotatably holds the first holding rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984091503U JPS619252U (en) | 1984-06-19 | 1984-06-19 | polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984091503U JPS619252U (en) | 1984-06-19 | 1984-06-19 | polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS619252U true JPS619252U (en) | 1986-01-20 |
Family
ID=30647449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984091503U Pending JPS619252U (en) | 1984-06-19 | 1984-06-19 | polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS619252U (en) |
-
1984
- 1984-06-19 JP JP1984091503U patent/JPS619252U/en active Pending
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