JPS598755U - Adhering plate for polished parts - Google Patents
Adhering plate for polished partsInfo
- Publication number
- JPS598755U JPS598755U JP1982103393U JP10339382U JPS598755U JP S598755 U JPS598755 U JP S598755U JP 1982103393 U JP1982103393 U JP 1982103393U JP 10339382 U JP10339382 U JP 10339382U JP S598755 U JPS598755 U JP S598755U
- Authority
- JP
- Japan
- Prior art keywords
- adhering plate
- polished parts
- polished
- plate
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は研磨装置の概略図、第２図ａ、 ｂは本案に
よる貼着板の実施例を示す斜視図である。
１：加圧自転軸、２：シリコンウェハー、４：貼着板、
５：ターンテーブル。FIG. 1 is a schematic view of a polishing device, and FIGS. 2a and 2b are perspective views showing an embodiment of the adhesive plate according to the present invention. 1: Pressurized rotation axis, 2: Silicon wafer, 4: Adhesive plate,
5: Turntable.
Claims (1)
研磨部材を貼り付ける貼着板の裏面に溝を形成したこと
を特徴とする被研磨部材の貼着板。A plate for attaching a member to be polished, characterized in that a groove is formed on the back surface of the plate to which the member to be polished is attached for polishing by lapping, polishing, etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982103393U JPS598755U (en) | 1982-07-07 | 1982-07-07 | Adhering plate for polished parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982103393U JPS598755U (en) | 1982-07-07 | 1982-07-07 | Adhering plate for polished parts |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS598755U true JPS598755U (en) | 1984-01-20 |
Family
ID=30243259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982103393U Pending JPS598755U (en) | 1982-07-07 | 1982-07-07 | Adhering plate for polished parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS598755U (en) |
-
1982
- 1982-07-07 JP JP1982103393U patent/JPS598755U/en active Pending
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