JPS5974054U - polishing jig - Google Patents
polishing jigInfo
- Publication number
- JPS5974054U JPS5974054U JP1982168731U JP16873182U JPS5974054U JP S5974054 U JPS5974054 U JP S5974054U JP 1982168731 U JP1982168731 U JP 1982168731U JP 16873182 U JP16873182 U JP 16873182U JP S5974054 U JPS5974054 U JP S5974054U
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- polishing jig
- bonding part
- wafer
- coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の研磨治具の断面図、第２図−は本考案の
一実施例の平面図、第３図は第２図のＡ−Ａ線断面図で
ある。
４：接着部、６：基台部、訃・・ウェハ。FIG. 1 is a sectional view of a conventional polishing jig, FIG. 2 is a plan view of an embodiment of the present invention, and FIG. 3 is a sectional view taken along the line A--A in FIG. 4: Adhesive part, 6: Base part, wafer.
Claims (1)
ウェハと同程度の膨張係数を有する板状の接着部と、こ
の接着部の他方の主面が接合され上記接着部より低い膨
張係数を有しかつ上記接着部より厚肉の板状に形成され
た基台部とを具備することを特徴とする研磨治具。A bonding surface for bonding a wafer is formed on one main surface, and a plate-shaped bonding part having a coefficient of expansion comparable to that of the wafer is bonded to the other main surface of the bonding part, which has a coefficient of expansion lower than that of the bonding part. and a base portion formed into a plate shape with a thicker wall than the adhesive portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982168731U JPS5974054U (en) | 1982-11-09 | 1982-11-09 | polishing jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982168731U JPS5974054U (en) | 1982-11-09 | 1982-11-09 | polishing jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5974054U true JPS5974054U (en) | 1984-05-19 |
Family
ID=30368803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982168731U Pending JPS5974054U (en) | 1982-11-09 | 1982-11-09 | polishing jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5974054U (en) |
-
1982
- 1982-11-09 JP JP1982168731U patent/JPS5974054U/en active Pending
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