JPS5851956U - lap surface plate - Google Patents
lap surface plateInfo
- Publication number
- JPS5851956U JPS5851956U JP1981148999U JP14899981U JPS5851956U JP S5851956 U JPS5851956 U JP S5851956U JP 1981148999 U JP1981148999 U JP 1981148999U JP 14899981 U JP14899981 U JP 14899981U JP S5851956 U JPS5851956 U JP S5851956U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- lap surface
- chamfering
- tapering
- corners
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図はラシプ定盤を示す平面図、第2図は従来のラッ
プ定盤を示す断面図、第3図は本考案の一実施例におけ
るラップ定盤を示す断面図、第4図は本考案の他の実施
例におけるラップ定盤を示す断面図である。
11・・・定盤本体、12.12’・・・溝部、13゜
13′・・・研磨剤落下穴部。Fig. 1 is a plan view showing a lapping surface plate, Fig. 2 is a sectional view showing a conventional lapping surface plate, Fig. 3 is a sectional view showing a lapping surface plate according to an embodiment of the present invention, and Fig. 4 is a sectional view showing a lapping surface plate according to an embodiment of the present invention. FIG. 7 is a sectional view showing a lap surface plate in another embodiment of the invention. 11...Surface plate body, 12.12'...Groove portion, 13°13'...Abrasive drop hole portion.
Claims (1)
りするかもしくはテーパー状とし、かつ該溝部を面取り
するかもしくはテーパー状としたことを特徴とするラッ
プ定盤。′ 2 定盤本体に研磨剤落下穴部を有し、この穴部の角部
を面取り゛するかもしくはテーパー状とした実用新案登
録請求の範囲第1項記載のラップ定盤。 ゛[Claims for Utility Model Registration] 1. A wrap characterized by chamfering or tapering the corners of the inner and outer periphery of a surface plate body having grooves on the surface, and chamfering or tapering the grooves. Surface plate. 2. The lapping surface plate according to claim 1, which has an abrasive drop hole in the surface plate body, and the corners of the hole are chamfered or tapered.゛
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981148999U JPS5851956U (en) | 1981-10-07 | 1981-10-07 | lap surface plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1981148999U JPS5851956U (en) | 1981-10-07 | 1981-10-07 | lap surface plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5851956U true JPS5851956U (en) | 1983-04-08 |
Family
ID=29941789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1981148999U Pending JPS5851956U (en) | 1981-10-07 | 1981-10-07 | lap surface plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5851956U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001054856A (en) * | 1999-07-09 | 2001-02-27 | Applied Materials Inc | Polishing pad having grooved pattern for chemical mechanical polishing device |
JP2016507388A (en) * | 2013-01-18 | 2016-03-10 | エルジー シルトロン インコーポレイテッド | Surface plate and double-side polishing apparatus for wafer including the same |
-
1981
- 1981-10-07 JP JP1981148999U patent/JPS5851956U/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001054856A (en) * | 1999-07-09 | 2001-02-27 | Applied Materials Inc | Polishing pad having grooved pattern for chemical mechanical polishing device |
JP2016507388A (en) * | 2013-01-18 | 2016-03-10 | エルジー シルトロン インコーポレイテッド | Surface plate and double-side polishing apparatus for wafer including the same |
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