JPS5851956U - lap surface plate - Google Patents

lap surface plate

Info

Publication number
JPS5851956U
JPS5851956U JP1981148999U JP14899981U JPS5851956U JP S5851956 U JPS5851956 U JP S5851956U JP 1981148999 U JP1981148999 U JP 1981148999U JP 14899981 U JP14899981 U JP 14899981U JP S5851956 U JPS5851956 U JP S5851956U
Authority
JP
Japan
Prior art keywords
surface plate
lap surface
chamfering
tapering
corners
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981148999U
Other languages
Japanese (ja)
Inventor
仁 大木
Original Assignee
東芝セラミツクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝セラミツクス株式会社 filed Critical 東芝セラミツクス株式会社
Priority to JP1981148999U priority Critical patent/JPS5851956U/en
Publication of JPS5851956U publication Critical patent/JPS5851956U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はラシプ定盤を示す平面図、第２図は従来のラッ
プ定盤を示す断面図、第３図は本考案の一実施例におけ
るラップ定盤を示す断面図、第４図は本考案の他の実施
例におけるラップ定盤を示す断面図である。 １１・・・定盤本体、１２．１２’・・・溝部、１３゜
１３′・・・研磨剤落下穴部。Fig. 1 is a plan view showing a lapping surface plate, Fig. 2 is a sectional view showing a conventional lapping surface plate, Fig. 3 is a sectional view showing a lapping surface plate according to an embodiment of the present invention, and Fig. 4 is a sectional view showing a lapping surface plate according to an embodiment of the present invention. FIG. 7 is a sectional view showing a lap surface plate in another embodiment of the invention. 11...Surface plate body, 12.12'...Groove portion, 13°13'...Abrasive drop hole portion.

Claims (1)

【実用新案登録請求の範囲】 １　表面に溝部を有する定盤本体の内外周の角部を面取
りするかもしくはテーパー状とし、かつ該溝部を面取り
するかもしくはテーパー状としたことを特徴とするラッ
プ定盤。′ ２　定盤本体に研磨剤落下穴部を有し、この穴部の角部
を面取り゛するかもしくはテーパー状とした実用新案登
録請求の範囲第１項記載のラップ定盤。　　　゛[Claims for Utility Model Registration] 1. A wrap characterized by chamfering or tapering the corners of the inner and outer periphery of a surface plate body having grooves on the surface, and chamfering or tapering the grooves. Surface plate. 2. The lapping surface plate according to claim 1, which has an abrasive drop hole in the surface plate body, and the corners of the hole are chamfered or tapered.゛
JP1981148999U 1981-10-07 1981-10-07 lap surface plate Pending JPS5851956U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981148999U JPS5851956U (en) 1981-10-07 1981-10-07 lap surface plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981148999U JPS5851956U (en) 1981-10-07 1981-10-07 lap surface plate

Publications (1)

Publication Number Publication Date
JPS5851956U true JPS5851956U (en) 1983-04-08

Family

ID=29941789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981148999U Pending JPS5851956U (en) 1981-10-07 1981-10-07 lap surface plate

Country Status (1)

Country Link
JP (1) JPS5851956U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001054856A (en) * 1999-07-09 2001-02-27 Applied Materials Inc Polishing pad having grooved pattern for chemical mechanical polishing device
JP2016507388A (en) * 2013-01-18 2016-03-10 エルジー シルトロン インコーポレイテッド Surface plate and double-side polishing apparatus for wafer including the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001054856A (en) * 1999-07-09 2001-02-27 Applied Materials Inc Polishing pad having grooved pattern for chemical mechanical polishing device
JP2016507388A (en) * 2013-01-18 2016-03-10 エルジー シルトロン インコーポレイテッド Surface plate and double-side polishing apparatus for wafer including the same

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