JPS6127660U - polishing equipment - Google Patents

polishing equipment

Info

Publication number
JPS6127660U
JPS6127660U JP1984112612U JP11261284U JPS6127660U JP S6127660 U JPS6127660 U JP S6127660U JP 1984112612 U JP1984112612 U JP 1984112612U JP 11261284 U JP11261284 U JP 11261284U JP S6127660 U JPS6127660 U JP S6127660U
Authority
JP
Japan
Prior art keywords
polishing
holder
polishing equipment
rotating
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984112612U
Other languages
Japanese (ja)
Inventor
重伸 和田
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP1984112612U priority Critical patent/JPS6127660U/en
Publication of JPS6127660U publication Critical patent/JPS6127660U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の研摩装置に用いバ研摩ホルダ及びその
保持部分の構造を示す図である。 第２図は従来用いられている研摩装置の一例を示す図で
ある。 図において１は研摩皿、２は研摩ク０ス、３は研摩ホル
ダ、４は半導体基板、５はおさえ板、６は保持棒、７は
ガイド、８はピン、９はおもり円板、１０はアーム、１
１は横棒、１２は支柱、１３は接触子、１４はおもり、
１５は本体、１６は研摩皿、１７は研摩クロス、１８は
研摩ホルタ、１９は半導体基板、２０は保持棒、２１は
アーム、２２は研摩液タンク、２３は研摩液、２４は管
をそれぞれ示す。FIG. 1 is a diagram showing the structure of a polishing holder and its holding portion used in the polishing apparatus of the present invention. FIG. 2 is a diagram showing an example of a conventionally used polishing device. In the figure, 1 is a polishing plate, 2 is a polishing cloth, 3 is a polishing holder, 4 is a semiconductor substrate, 5 is a holding plate, 6 is a holding rod, 7 is a guide, 8 is a pin, 9 is a weight disc, and 10 is a Arm, 1
1 is a horizontal bar, 12 is a column, 13 is a contact, 14 is a weight,
15 is the main body, 16 is a polishing plate, 17 is a polishing cloth, 18 is a polishing holder, 19 is a semiconductor substrate, 20 is a holding rod, 21 is an arm, 22 is a polishing liquid tank, 23 is a polishing liquid, and 24 is a tube. .

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転する研摩皿に対向して被研摩物を接着した研摩ホル
ダを保持し、研摩皿と被研摩物の摩擦によって被研摩物
を従動回転させて研摩を行なう研摩装置において、研摩
ホルダとそれを支える保持棒からなる集合体を上方へ持
ち上げて研摩圧力を軽減する機構を有することを特徴と
する研摩装置。In a polishing device that holds a polishing holder to which an object to be polished is attached opposite a rotating polishing plate, and performs polishing by rotating the object due to friction between the polishing plate and the object, the polishing holder and its support are used. A polishing device characterized by having a mechanism for lifting an assembly consisting of holding rods upward to reduce polishing pressure.
JP1984112612U 1984-07-25 1984-07-25 polishing equipment Pending JPS6127660U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984112612U JPS6127660U (en) 1984-07-25 1984-07-25 polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984112612U JPS6127660U (en) 1984-07-25 1984-07-25 polishing equipment

Publications (1)

Publication Number Publication Date
JPS6127660U true JPS6127660U (en) 1986-02-19

Family

ID=30671655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984112612U Pending JPS6127660U (en) 1984-07-25 1984-07-25 polishing equipment

Country Status (1)

Country Link
JP (1) JPS6127660U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046621U (en) * 1989-12-30 1992-01-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046621U (en) * 1989-12-30 1992-01-22

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