JPS6191659A - 直線検出装置 - Google Patents

直線検出装置

Info

Publication number
JPS6191659A
JPS6191659A JP59212881A JP21288184A JPS6191659A JP S6191659 A JPS6191659 A JP S6191659A JP 59212881 A JP59212881 A JP 59212881A JP 21288184 A JP21288184 A JP 21288184A JP S6191659 A JPS6191659 A JP S6191659A
Authority
JP
Japan
Prior art keywords
area
circuit
straight line
divided
binary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59212881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0346044B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Sadaaki Yokoi
横井　貞明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP59212881A priority Critical patent/JPS6191659A/ja
Publication of JPS6191659A publication Critical patent/JPS6191659A/ja
Publication of JPH0346044B2 publication Critical patent/JPH0346044B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59212881A 1984-10-11 1984-10-11 直線検出装置 Granted JPS6191659A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59212881A JPS6191659A (ja) 1984-10-11 1984-10-11 直線検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59212881A JPS6191659A (ja) 1984-10-11 1984-10-11 直線検出装置

Publications (2)

Publication Number Publication Date
JPS6191659A true JPS6191659A (ja) 1986-05-09
JPH0346044B2 JPH0346044B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-07-15

Family

ID=16629804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59212881A Granted JPS6191659A (ja) 1984-10-11 1984-10-11 直線検出装置

Country Status (1)

Country Link
JP (1) JPS6191659A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014016361A (ja) * 2013-09-25 2014-01-30 Hitachi High-Technologies Corp パターン寸法算出方法、及び画像解析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014016361A (ja) * 2013-09-25 2014-01-30 Hitachi High-Technologies Corp パターン寸法算出方法、及び画像解析装置

Also Published As

Publication number Publication date
JPH0346044B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-07-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees