JPS6188234U - - Google Patents
Info
- Publication number
- JPS6188234U JPS6188234U JP17314484U JP17314484U JPS6188234U JP S6188234 U JPS6188234 U JP S6188234U JP 17314484 U JP17314484 U JP 17314484U JP 17314484 U JP17314484 U JP 17314484U JP S6188234 U JPS6188234 U JP S6188234U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- heater
- main body
- tray
- quartz tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000002310 reflectometry Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17314484U JPS6188234U (de) | 1984-11-16 | 1984-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17314484U JPS6188234U (de) | 1984-11-16 | 1984-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6188234U true JPS6188234U (de) | 1986-06-09 |
Family
ID=30730804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17314484U Pending JPS6188234U (de) | 1984-11-16 | 1984-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188234U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03224217A (ja) * | 1988-06-16 | 1991-10-03 | Tokyo Electron Sagami Ltd | 熱処理装置及び熱処理方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5390033A (en) * | 1977-01-19 | 1978-08-08 | Hitachi Ltd | Heat treatment equipment |
| JPS5691417A (en) * | 1979-12-26 | 1981-07-24 | Fujitsu Ltd | Heating treatment device for wafer |
-
1984
- 1984-11-16 JP JP17314484U patent/JPS6188234U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5390033A (en) * | 1977-01-19 | 1978-08-08 | Hitachi Ltd | Heat treatment equipment |
| JPS5691417A (en) * | 1979-12-26 | 1981-07-24 | Fujitsu Ltd | Heating treatment device for wafer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03224217A (ja) * | 1988-06-16 | 1991-10-03 | Tokyo Electron Sagami Ltd | 熱処理装置及び熱処理方法 |
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