JPS6186936U - - Google Patents

Info

Publication number
JPS6186936U
JPS6186936U JP17038084U JP17038084U JPS6186936U JP S6186936 U JPS6186936 U JP S6186936U JP 17038084 U JP17038084 U JP 17038084U JP 17038084 U JP17038084 U JP 17038084U JP S6186936 U JPS6186936 U JP S6186936U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
inert gas
heating chamber
heating device
heat source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17038084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17038084U priority Critical patent/JPS6186936U/ja
Publication of JPS6186936U publication Critical patent/JPS6186936U/ja
Pending legal-status Critical Current

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  • Furnace Details (AREA)
JP17038084U 1984-11-12 1984-11-12 Pending JPS6186936U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17038084U JPS6186936U (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17038084U JPS6186936U (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Publications (1)

Publication Number Publication Date
JPS6186936U true JPS6186936U (enrdf_load_stackoverflow) 1986-06-07

Family

ID=30728087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17038084U Pending JPS6186936U (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS6186936U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681928A (en) * 1979-10-17 1981-07-04 Itt Semiconductor annealing treatment
JPS5977289A (ja) * 1982-10-26 1984-05-02 ウシオ電機株式会社 光照射炉

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681928A (en) * 1979-10-17 1981-07-04 Itt Semiconductor annealing treatment
JPS5977289A (ja) * 1982-10-26 1984-05-02 ウシオ電機株式会社 光照射炉

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