JPS6186936U - - Google Patents
Info
- Publication number
- JPS6186936U JPS6186936U JP17038084U JP17038084U JPS6186936U JP S6186936 U JPS6186936 U JP S6186936U JP 17038084 U JP17038084 U JP 17038084U JP 17038084 U JP17038084 U JP 17038084U JP S6186936 U JPS6186936 U JP S6186936U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- inert gas
- heating chamber
- heating device
- heat source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 description 2
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17038084U JPS6186936U (cs) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17038084U JPS6186936U (cs) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186936U true JPS6186936U (cs) | 1986-06-07 |
Family
ID=30728087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17038084U Pending JPS6186936U (cs) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186936U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681928A (en) * | 1979-10-17 | 1981-07-04 | Itt | Semiconductor annealing treatment |
| JPS5977289A (ja) * | 1982-10-26 | 1984-05-02 | ウシオ電機株式会社 | 光照射炉 |
-
1984
- 1984-11-12 JP JP17038084U patent/JPS6186936U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5681928A (en) * | 1979-10-17 | 1981-07-04 | Itt | Semiconductor annealing treatment |
| JPS5977289A (ja) * | 1982-10-26 | 1984-05-02 | ウシオ電機株式会社 | 光照射炉 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6186936U (cs) | ||
| JPS6186934U (cs) | ||
| JPS6186935U (cs) | ||
| JPH0429229Y2 (cs) | ||
| JPS6033159U (ja) | 瞬間ガス湯沸器 | |
| JPH01175803U (cs) | ||
| JPS5912951U (ja) | 強制送風式湯沸器 | |
| JPS6184427U (cs) | ||
| JPH0292924U (cs) | ||
| JPS58159423U (ja) | 熱交換器付同時給排気形レンジフ−ド | |
| JPS61204125U (cs) | ||
| JPH01107128U (cs) | ||
| JPS6430331U (cs) | ||
| JPS58103650U (ja) | 温室用加熱装置 | |
| JPS55110818A (en) | Forced suction and exhausting type combustion device | |
| JPS63170456U (cs) | ||
| JPH0430741U (cs) | ||
| JPS61123352U (cs) | ||
| JPS63147685U (cs) | ||
| JPH0337388U (cs) | ||
| JPS63129146U (cs) | ||
| JPS6168496U (cs) | ||
| JPS58131341U (ja) | 強制給排気型給湯器 | |
| JPS61200555U (cs) | ||
| JPS5975634U (ja) | 湯沸器付換気扇装置 |