JPS6184536A - 水晶式気体圧力計 - Google Patents

水晶式気体圧力計

Info

Publication number
JPS6184536A
JPS6184536A JP20757784A JP20757784A JPS6184536A JP S6184536 A JPS6184536 A JP S6184536A JP 20757784 A JP20757784 A JP 20757784A JP 20757784 A JP20757784 A JP 20757784A JP S6184536 A JPS6184536 A JP S6184536A
Authority
JP
Japan
Prior art keywords
crystal
voltage
gas pressure
pressure
pll circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20757784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0374934B2 (enrdf_load_stackoverflow
Inventor
Fujio Tamura
田村　富士夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP20757784A priority Critical patent/JPS6184536A/ja
Publication of JPS6184536A publication Critical patent/JPS6184536A/ja
Publication of JPH0374934B2 publication Critical patent/JPH0374934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP20757784A 1984-10-03 1984-10-03 水晶式気体圧力計 Granted JPS6184536A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20757784A JPS6184536A (ja) 1984-10-03 1984-10-03 水晶式気体圧力計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20757784A JPS6184536A (ja) 1984-10-03 1984-10-03 水晶式気体圧力計

Publications (2)

Publication Number Publication Date
JPS6184536A true JPS6184536A (ja) 1986-04-30
JPH0374934B2 JPH0374934B2 (enrdf_load_stackoverflow) 1991-11-28

Family

ID=16542057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20757784A Granted JPS6184536A (ja) 1984-10-03 1984-10-03 水晶式気体圧力計

Country Status (1)

Country Link
JP (1) JPS6184536A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0374934B2 (enrdf_load_stackoverflow) 1991-11-28

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