JPS6183694A - Manufacture of ceramic member with metallized layer - Google Patents
Manufacture of ceramic member with metallized layerInfo
- Publication number
- JPS6183694A JPS6183694A JP20429184A JP20429184A JPS6183694A JP S6183694 A JPS6183694 A JP S6183694A JP 20429184 A JP20429184 A JP 20429184A JP 20429184 A JP20429184 A JP 20429184A JP S6183694 A JPS6183694 A JP S6183694A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic member
- metal
- ceramic
- metallized layer
- molybdenum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ceramic Capacitors (AREA)
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明１．２メタライズ層付セラミックス部（イの製造
方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to 1.2 a method for manufacturing a ceramic part with a metallized layer (A).
従来の技術
炭化珪素、窒化珪素、アル疋す、ジルコニア等のニュー
セラミックスと称せらｉる焼結体（、を高湿高強度、耐
摩耗性竿に優１ているのに注目さ釘て、エンジン用部材
、耐摩耗性卒必要とする恨域部品などへの応用が企だて
ら１ている。しかし、加工や強度的な信頼性の面からオ
ールセラミックス製の装置をつくることは難しいため、
高熱にさらさねる箇所や耐摩耗性を必要とする箇所のみ
に取付けることが考えらＩている。この場合、セラミッ
クスｙ！月と金属部材とを接合する必要があるが、セラ
ミックス部材と金買部材とル直接接合することＣｉ惟し
く、セラミックス部側の表面を一旦メタライズして金が
化層を形成した後、この金属化層と金属部材とを接合す
ることが提案さｎている。Conventional technology Sintered bodies (sintered bodies called new ceramics such as silicon carbide, silicon nitride, aluminum, zirconia, etc.) are notable for their superior high-humidity, high-strength, and wear-resistant properties. There are plans to apply it to engine parts and parts that require wear resistance.However, it is difficult to make an all-ceramic device from the viewpoint of processing and strength reliability.
The idea is to install it only in areas that are exposed to high heat or require wear resistance. In this case, ceramics y! It is necessary to join the moon and the metal component, but it is necessary to directly join the ceramic component and the gold component. It has been proposed to bond a metal layer and a metal member.
その提案の一つとして、セラミックス部材表面にセラミ
ックスと密着性のよい金属箔を配ｆＹ シ、高温加熱す
ると共に加圧してメタライズ化する方法がある。One such proposal is a method of distributing a metal foil that has good adhesion to the ceramic material on the surface of the ceramic member, and metallizing the material by heating it at a high temperature and applying pressure.
発明が解決しようとする間顎点
上記従来方法によｎば、初め番ごセラミックス部材を完
全に泳成し、次にメタライズのための加熱を必要とする
ため、２回高温加熱し４Ｃはｎばｌ（らず、このために
多食のハエえルギーが消費される。Problems to be Solved by the Invention According to the above-mentioned conventional method, it is necessary to first completely electrolyze the ceramic member and then heat it for metallization. For this reason, a large amount of fly energy is consumed.
またセラミックス部材は高温加（偽時に割ｎやすく、そ
の７：７Ｊ （る襖会が２回ある。したがって歩留りの
悪いものである。In addition, ceramic parts are easily cracked when heated to high temperatures (false), and there are two fusuma (7:7J) processes.Therefore, the yield is poor.
間？１ｆＰ解決するための手段
上記２４題点を屏決するため、本発明のメタライズ層付
セラミックス部材の製造方法は、未焼ｈυのセラミ、−
、クス部材を成形し、この成形されたセラミックモ
次にセラミックス部材にメタライズ用金真粉末または金
属板を介して金属部判を配し、次にそｎｅ金居膜により
被覆すると共にその金属膜内ル真空；こし、次−ご金属
膜を介して金属部月をセラミックス部材に加圧し、セラ
ミックス部材を加熱焼成するものである。while? Means for Solving 1fP In order to resolve the above 24 problems, the method for manufacturing a ceramic member with a metallized layer of the present invention is based on the method of manufacturing an unfired hυ ceramic, -
Then, a metal plate is placed on the formed ceramic member via gold powder for metallization or a metal plate, and then it is coated with a metal film and the metal film is coated. The inner vacuum is applied to press the metal part against the ceramic member through the metal film, and the ceramic member is heated and fired.
実挿例
以下、本発明の一実施例ち第１図１こ基づいて説明する
。まずジルコニア粉末に所定量の百椴粘結剤や水などル
：ｊ：：加混合し、次にそ１ル冷間静水圧成型法により
所定形状のセラミックス部材（生型）に成形し、次にそ
の成形さｎたセラミックス部材を加熱炉内に人ねてゆ１
くりと加熱し、約５００ ｔ：：ニ保持して仮焼力見す
る。これ１こよってｆ３バインダ ′処理がおこなわｎ
る。次に図に示すごとく仮焼成さｎたセラミックス部材
（１）の表面にＪ・λさ２０μｍのＺｒ 箔（２）た
配し、次にそのＺｒ箔（２）上に厚さ２ｎのＣｕ 板（
３）９−配し、次にそｒを厚さＱ、６すのモリブデンＨ
（ｓｕｓ ８０４ ） （４）で被覆する。このときモ
リブデン膜（４）内にほとんど空隙が生じ７：Ｃいよう
にする。次にモリブデン膜（４）に設けたパイプ（５）
を真空ポンプ（図示せず）に接続し、モリブデン膜（４
）内から排気し、内部圧か１０ ｔｏｒｒ になっ
たところでバルブ（６）を閉じ、次に熱間静水圧成型法
によりモリブデン膜（４）を介してＣｕ板（３）および
Ｚｒ箔（２１をセラミックス部材（１）に５〜６１で加
圧し、セラミ・ンクス部月（１）を１５００℃で加熱焼
成するものである。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. 1. First, zirconia powder is mixed with a predetermined amount of Hyakusa binder and water, and then the mixture is molded into a ceramic member (green mold) of a predetermined shape by cold isostatic pressing. The molded ceramic member is then placed in a heating furnace.
Heat slowly and hold for about 500 t to check the calcining strength. This 1 causes f3 binder processing to be performed.
Ru. Next, as shown in the figure, a Zr foil (2) with a J-λ of 20 μm is placed on the surface of the pre-fired ceramic member (1), and then a 2n-thick Cu plate is placed on the Zr foil (2). (
3) 9-plate, then the thickness Q, 6 molybdenum H
(sus 804) (4). At this time, almost all voids are created in the molybdenum film (4) so that 7:C is formed. Next, the pipe (5) installed on the molybdenum membrane (4)
is connected to a vacuum pump (not shown), and a molybdenum film (4
), and when the internal pressure reaches 10 torr, close the valve (6), then hot isostatically press the Cu plate (3) and Zr foil (21) through the molybdenum film (4). The ceramic member (1) is pressurized at a pressure of 5 to 61, and the ceramic member (1) is heated and fired at 1500°C.
上記製造方法によりモリブデンで被覆さまた焼成体を得
ることができる。この焼成体を切断して断面を調査しｔ
こ結果、Ｚｒ箔（２）とＣｕ板（３）との闇ではＺｒ層
に数μｍにわたってＣｕとＺｒとの合金が溶融浸透した
合金層がみらｆ”Ｌ ％ Ｃｕ板（３）とモリブデン膜
（４）との間に１ｉモリブデンとＣｕとの合金層らしき
ものがみらｎた。A fired body coated with molybdenum can be obtained by the above manufacturing method. This fired body was cut and the cross section was investigated.
As a result, between the Zr foil (2) and the Cu plate (3), an alloy layer in which the alloy of Cu and Zr melted and penetrated over several μm was seen in the Zr layer. What appeared to be an alloy layer of 1i molybdenum and Cu was observed between the film (4) and the film (4).
上記成形体の使用にあたってはモリブデン膜（４）′：
Ｐ除去して所定金７岡部材に拡散接合またはろう付けす
ｎばよい。When using the above molded body, the molybdenum film (4)':
It is sufficient to remove P and diffusion bond or braze to a predetermined metal member.
なお、拡散接合面またはろう付は面以外の面にモリブデ
ンが付着していｎばＭ能が低下するときにＩ′ｉ、そｆ
″Ｌを研削除去すｎばよい。In addition, if molybdenum is attached to a surface other than the diffusion bonding surface or brazing surface, the M performance will decrease, I'i,
All you have to do is remove ``L'' by polishing.
本発明の他の実施例を第２図に基づいて説明する。ｉｎ
記実施例と同じように仮焼成さまたアルミナ粉末からな
るセラミックス部材（１）の表面にＴｉ消（８）を介し
てＣｕ板（３）を配し、次にそＶをモリブデン膜（４）
で被覆する。こｎを真空室内に入１、モリブデンＩ摸（
４）の開口隅部をル子ビーム溶接してモリブデンｒ９（
４）を完全密閉状ＩＳにし、次にそｎを真空室内から取
出し、熱間静水圧成型法によりモリブデン膜（４）ｆｐ
介して真空中のＣｕ板（３）をセラミックス部材（１）
に６〜６〜で加圧し、セラミックス部材（１）を１７０
０℃ で加熱焼成するものである。Another embodiment of the present invention will be described based on FIG. in
As in the above example, a Cu plate (3) is placed on the surface of a ceramic member (1) made of pre-sintered alumina powder through a Ti film (8), and then a molybdenum film (4) is placed on the surface of the ceramic member (1).
Cover with Put this into a vacuum chamber, add a sample of molybdenum I (
4) The corner of the opening was welded with a beam of molybdenum R9 (
4) into a completely sealed IS, then take it out from the vacuum chamber and form a molybdenum film (4) fp by hot isostatic pressing.
Place the Cu plate (3) in vacuum through the ceramic member (1).
Pressure is applied to the ceramic member (1) at 170°C.
It is heated and fired at 0°C.
こｔ冒ζよりＣｕ−Ｔｉ合金のメタライズ層の付いた焼
成アルミナが得らｎた。Through this process, fired alumina with a metallized layer of Cu--Ti alloy was obtained.
窒化硅素や炭化珪ブ（からなるセラミックス塚１−ｊの
場合（オ、その士に金’ｌ Ｓｉ粉末ｆｐ塗布し、その
上にＣｕ板（３）を配し、次にモリブデン膜で；’ｊ、
Ｎ Ｌ／、・暁成すＩばよい。In the case of a ceramic mound 1-j made of silicon nitride or silicon carbide (e), gold'l Si powder fp is applied thereto, a Cu plate (3) is placed on top of it, and then a molybdenum film is applied. j,
N L/,・Akatsuki Seisu I should do it.
７明の効果
以上述べたごとく本発明によれば、メタうイズと焼成と
を同時におこなうことから、省エネルギーとなり、また
高湿にさらすのＣオー明であるから、セラミ、ンクス部
柑の加熱時の損（］も少４Ｃ＜、歩留りが向上する。7 Effects of Lighting As described above, according to the present invention, meta-warming and firing are performed at the same time, which saves energy, and since it is easy to expose to high humidity, it is possible to reduce the heating time of ceramic and nkusubukan. The loss () is also small and the yield is improved.
第１ ［’に６は本発明の一実加、傍を示す堅断面ＩＪ
、第２図は本発明の池の実施例２示す−，’：Ｅ ｔｔ
ｙ７面「イ１である。6 is a hard surface IJ showing the addition and side of the present invention.
, FIG. 2 shows a second embodiment of the pond of the present invention -,':E tt
Y7 side “I1.
Claims (1)
たセラミックス部材多板焼成して脱バインダー処理し、
次にセラミックス部材にメタライズ用金属粉末または金
属板を介して金属部材を配し、次にそれを金属膜により
被覆すると共にその金属膜内を真空にし、次に金属膜を
介して金属部材をセラミックス部材に加圧し、セラミッ
クス部材を加熱焼成することを特徴とするメタライズ層
付セラミックス部材の製造方法。1. Molding an unfired ceramic member, firing multiple plates of the molded ceramic member and removing the binder,
Next, a metal member is placed on the ceramic member via a metallizing metal powder or a metal plate, and then it is covered with a metal film and the inside of the metal film is evacuated, and then the metal member is placed on the ceramic member via the metal film. A method for manufacturing a ceramic member with a metallized layer, which comprises applying pressure to the member and heating and firing the ceramic member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20429184A JPS6183694A (en) | 1984-09-28 | 1984-09-28 | Manufacture of ceramic member with metallized layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20429184A JPS6183694A (en) | 1984-09-28 | 1984-09-28 | Manufacture of ceramic member with metallized layer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183694A true JPS6183694A (en) | 1986-04-28 |
Family
ID=16488045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20429184A Pending JPS6183694A (en) | 1984-09-28 | 1984-09-28 | Manufacture of ceramic member with metallized layer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183694A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1100626A4 (en) * | 1998-05-06 | 2004-12-08 | Pacific Coast Technologies Inc | Methods for treating ceramic materials and improved treated ceramic materials produced thereby |
| KR20160122700A (en) * | 2013-12-10 | 2016-10-24 | 로저스 저매니 게엠베하 | Method for producing a metal-ceramic substrate |
| WO2021219260A1 (en) * | 2020-04-29 | 2021-11-04 | Rogers Germany Gmbh | Process for producing a metal-ceramic substrate, and a metal-ceramic substrate produced using such a method |
-
1984
- 1984-09-28 JP JP20429184A patent/JPS6183694A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1100626A4 (en) * | 1998-05-06 | 2004-12-08 | Pacific Coast Technologies Inc | Methods for treating ceramic materials and improved treated ceramic materials produced thereby |
| KR20160122700A (en) * | 2013-12-10 | 2016-10-24 | 로저스 저매니 게엠베하 | Method for producing a metal-ceramic substrate |
| JP2017501883A (en) * | 2013-12-10 | 2017-01-19 | ロジャーズ ジャーマニー ゲーエムベーハーＲｏｇｅｒｓ Ｇｅｒｍａｎｙ ＧｍｂＨ | Method for manufacturing a metal ceramic substrate |
| WO2021219260A1 (en) * | 2020-04-29 | 2021-11-04 | Rogers Germany Gmbh | Process for producing a metal-ceramic substrate, and a metal-ceramic substrate produced using such a method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4602731A (en) | Direct liquid phase bonding of ceramics to metals | |
| KR100432075B1 (en) | A method of coating a non-wetting fluid material on a substrate, a method of manufacturing a ceramic metal structure, a method of bonding a plurality of ceramic bodies, and a layered structure formed by such a method | |
| JPS60212657A (en) | Composite heat shield for engine parts and its formation | |
| US5985464A (en) | Composite structure, and method of making same | |
| JPS6217080A (en) | Method of joining silicon carbide formed body members | |
| US4598025A (en) | Ductile composite interlayer for joining by brazing | |
| JPS60131874A (en) | Method of bonding ceramic and metal | |
| JPH0454825B2 (en) | ||
| US4645117A (en) | Bonding metal to ceramic | |
| JPS6183694A (en) | Manufacture of ceramic member with metallized layer | |
| JPS6077177A (en) | Ceramic bonded body | |
| US3265473A (en) | Metalized ceramic members | |
| JPH0472793B2 (en) | ||
| JPH0492871A (en) | Ceramic-metal binding body and production thereof | |
| JPS59137379A (en) | Composite sintered ceramics and metal adhesion | |
| JPH02196075A (en) | Joined structure | |
| JPS6270284A (en) | Metallized silicon carbide ceramics body and its production | |
| JPS5935074A (en) | Ceramic sheet | |
| JPS6338244A (en) | Manufacture of ceramic substrate for semiconductor device and clad material used for the same | |
| JPS61119878A (en) | Heat insulating gasket and manufacture thereof | |
| JPS59203779A (en) | Method of bonding ceramic sintered bodies having different thermal expansion coefficients or ceramic sintered body to metal member | |
| JPS61136968A (en) | Bonded body of ceramic members | |
| JP2858583B2 (en) | Joining method of zirconium oxide ceramic and metal | |
| JPS6177681A (en) | Method of bonding nitride ceramics | |
| JPS59164676A (en) | Ceramic-metal bonded body and manufacture |