JPS6183449U - - Google Patents

Info

Publication number
JPS6183449U
JPS6183449U JP16862084U JP16862084U JPS6183449U JP S6183449 U JPS6183449 U JP S6183449U JP 16862084 U JP16862084 U JP 16862084U JP 16862084 U JP16862084 U JP 16862084U JP S6183449 U JPS6183449 U JP S6183449U
Authority
JP
Japan
Prior art keywords
microwave
plasma
plasma processing
plasma generation
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16862084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029895Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16862084U priority Critical patent/JPH029895Y2/ja
Publication of JPS6183449U publication Critical patent/JPS6183449U/ja
Application granted granted Critical
Publication of JPH029895Y2 publication Critical patent/JPH029895Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP16862084U 1984-11-08 1984-11-08 Expired JPH029895Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16862084U JPH029895Y2 (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16862084U JPH029895Y2 (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Publications (2)

Publication Number Publication Date
JPS6183449U true JPS6183449U (enrdf_load_stackoverflow) 1986-06-02
JPH029895Y2 JPH029895Y2 (enrdf_load_stackoverflow) 1990-03-12

Family

ID=30726385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16862084U Expired JPH029895Y2 (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Country Status (1)

Country Link
JP (1) JPH029895Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021060160A1 (ja) * 2019-09-25 2021-04-01 芝浦機械株式会社 表面処理装置
JP2021049493A (ja) * 2019-09-25 2021-04-01 芝浦機械株式会社 表面処理装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9388185B2 (en) 2012-08-10 2016-07-12 Incyte Holdings Corporation Substituted pyrrolo[2,3-b]pyrazines as FGFR inhibitors
US9266892B2 (en) 2012-12-19 2016-02-23 Incyte Holdings Corporation Fused pyrazoles as FGFR inhibitors
EP3318564B1 (en) 2013-04-19 2021-07-28 Incyte Holdings Corporation Bicyclic heterocycles as fgfr inhibitors
US9580423B2 (en) 2015-02-20 2017-02-28 Incyte Corporation Bicyclic heterocycles as FGFR4 inhibitors
WO2021007269A1 (en) 2019-07-09 2021-01-14 Incyte Corporation Bicyclic heterocycles as fgfr inhibitors
WO2021076728A1 (en) 2019-10-16 2021-04-22 Incyte Corporation Bicyclic heterocycles as fgfr inhibitors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021060160A1 (ja) * 2019-09-25 2021-04-01 芝浦機械株式会社 表面処理装置
JP2021049493A (ja) * 2019-09-25 2021-04-01 芝浦機械株式会社 表面処理装置

Also Published As

Publication number Publication date
JPH029895Y2 (enrdf_load_stackoverflow) 1990-03-12

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