JPS6367275U - - Google Patents
Info
- Publication number
- JPS6367275U JPS6367275U JP16182086U JP16182086U JPS6367275U JP S6367275 U JPS6367275 U JP S6367275U JP 16182086 U JP16182086 U JP 16182086U JP 16182086 U JP16182086 U JP 16182086U JP S6367275 U JPS6367275 U JP S6367275U
- Authority
- JP
- Japan
- Prior art keywords
- excimer laser
- carbon content
- nickel material
- laser device
- low carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- 230000002123 temporal effect Effects 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986161820U JPH079402Y2 (ja) | 1986-10-21 | 1986-10-21 | エキシマレ−ザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986161820U JPH079402Y2 (ja) | 1986-10-21 | 1986-10-21 | エキシマレ−ザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6367275U true JPS6367275U (enrdf_load_stackoverflow) | 1988-05-06 |
| JPH079402Y2 JPH079402Y2 (ja) | 1995-03-06 |
Family
ID=31088492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986161820U Expired - Lifetime JPH079402Y2 (ja) | 1986-10-21 | 1986-10-21 | エキシマレ−ザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079402Y2 (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60196989A (ja) * | 1979-12-03 | 1985-10-05 | バ−ナ−ド・ビ−・カツツ | エキシマ・ガス・レ−ザ− |
| JPS6190485A (ja) * | 1984-10-09 | 1986-05-08 | Mitsubishi Electric Corp | パルスレ−ザ発振器 |
-
1986
- 1986-10-21 JP JP1986161820U patent/JPH079402Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60196989A (ja) * | 1979-12-03 | 1985-10-05 | バ−ナ−ド・ビ−・カツツ | エキシマ・ガス・レ−ザ− |
| JPS6190485A (ja) * | 1984-10-09 | 1986-05-08 | Mitsubishi Electric Corp | パルスレ−ザ発振器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079402Y2 (ja) | 1995-03-06 |
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