JPS6183032U - - Google Patents
Info
- Publication number
- JPS6183032U JPS6183032U JP16759184U JP16759184U JPS6183032U JP S6183032 U JPS6183032 U JP S6183032U JP 16759184 U JP16759184 U JP 16759184U JP 16759184 U JP16759184 U JP 16759184U JP S6183032 U JPS6183032 U JP S6183032U
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- semiconductor wafers
- cleaning
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16759184U JPS6183032U (US06566495-20030520-M00011.png) | 1984-11-05 | 1984-11-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16759184U JPS6183032U (US06566495-20030520-M00011.png) | 1984-11-05 | 1984-11-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6183032U true JPS6183032U (US06566495-20030520-M00011.png) | 1986-06-02 |
Family
ID=30725380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16759184U Pending JPS6183032U (US06566495-20030520-M00011.png) | 1984-11-05 | 1984-11-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6183032U (US06566495-20030520-M00011.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62202393U (US06566495-20030520-M00011.png) * | 1986-06-12 | 1987-12-23 | ||
JPH01199432A (ja) * | 1987-09-09 | 1989-08-10 | Orr Robert F | シリコンウエハーの洗浄、濯ぎ、乾燥方法及び装置 |
JPH0291339U (US06566495-20030520-M00011.png) * | 1989-01-05 | 1990-07-19 |
-
1984
- 1984-11-05 JP JP16759184U patent/JPS6183032U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62202393U (US06566495-20030520-M00011.png) * | 1986-06-12 | 1987-12-23 | ||
JPH01199432A (ja) * | 1987-09-09 | 1989-08-10 | Orr Robert F | シリコンウエハーの洗浄、濯ぎ、乾燥方法及び装置 |
JPH0291339U (US06566495-20030520-M00011.png) * | 1989-01-05 | 1990-07-19 |