JPS6183029U - - Google Patents
Info
- Publication number
- JPS6183029U JPS6183029U JP1984168327U JP16832784U JPS6183029U JP S6183029 U JPS6183029 U JP S6183029U JP 1984168327 U JP1984168327 U JP 1984168327U JP 16832784 U JP16832784 U JP 16832784U JP S6183029 U JPS6183029 U JP S6183029U
- Authority
- JP
- Japan
- Prior art keywords
- irradiator
- vapor phase
- phase growth
- reactant gas
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984168327U JPS6183029U (enExample) | 1984-11-06 | 1984-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984168327U JPS6183029U (enExample) | 1984-11-06 | 1984-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183029U true JPS6183029U (enExample) | 1986-06-02 |
Family
ID=30726103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984168327U Pending JPS6183029U (enExample) | 1984-11-06 | 1984-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183029U (enExample) |
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1984
- 1984-11-06 JP JP1984168327U patent/JPS6183029U/ja active Pending