JPS61164278U - - Google Patents
Info
- Publication number
- JPS61164278U JPS61164278U JP4494685U JP4494685U JPS61164278U JP S61164278 U JPS61164278 U JP S61164278U JP 4494685 U JP4494685 U JP 4494685U JP 4494685 U JP4494685 U JP 4494685U JP S61164278 U JPS61164278 U JP S61164278U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- performs
- thin film
- film forming
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000010494 dissociation reaction Methods 0.000 claims 1
- 230000005593 dissociations Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4494685U JPS61164278U (enExample) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4494685U JPS61164278U (enExample) | 1985-03-29 | 1985-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164278U true JPS61164278U (enExample) | 1986-10-11 |
Family
ID=30557992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4494685U Pending JPS61164278U (enExample) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164278U (enExample) |
-
1985
- 1985-03-29 JP JP4494685U patent/JPS61164278U/ja active Pending