JPS6183029U - - Google Patents

Info

Publication number
JPS6183029U
JPS6183029U JP16832784U JP16832784U JPS6183029U JP S6183029 U JPS6183029 U JP S6183029U JP 16832784 U JP16832784 U JP 16832784U JP 16832784 U JP16832784 U JP 16832784U JP S6183029 U JPS6183029 U JP S6183029U
Authority
JP
Japan
Prior art keywords
irradiator
vapor phase
phase growth
reactant gas
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16832784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16832784U priority Critical patent/JPS6183029U/ja
Publication of JPS6183029U publication Critical patent/JPS6183029U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16832784U 1984-11-06 1984-11-06 Pending JPS6183029U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16832784U JPS6183029U (enrdf_load_stackoverflow) 1984-11-06 1984-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16832784U JPS6183029U (enrdf_load_stackoverflow) 1984-11-06 1984-11-06

Publications (1)

Publication Number Publication Date
JPS6183029U true JPS6183029U (enrdf_load_stackoverflow) 1986-06-02

Family

ID=30726103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16832784U Pending JPS6183029U (enrdf_load_stackoverflow) 1984-11-06 1984-11-06

Country Status (1)

Country Link
JP (1) JPS6183029U (enrdf_load_stackoverflow)

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