JPS62184734U - - Google Patents

Info

Publication number
JPS62184734U
JPS62184734U JP7302586U JP7302586U JPS62184734U JP S62184734 U JPS62184734 U JP S62184734U JP 7302586 U JP7302586 U JP 7302586U JP 7302586 U JP7302586 U JP 7302586U JP S62184734 U JPS62184734 U JP S62184734U
Authority
JP
Japan
Prior art keywords
lamps
adjusted
utility
vapor phase
reflecting plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7302586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7302586U priority Critical patent/JPS62184734U/ja
Publication of JPS62184734U publication Critical patent/JPS62184734U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP7302586U 1986-05-15 1986-05-15 Pending JPS62184734U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7302586U JPS62184734U (enrdf_load_stackoverflow) 1986-05-15 1986-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7302586U JPS62184734U (enrdf_load_stackoverflow) 1986-05-15 1986-05-15

Publications (1)

Publication Number Publication Date
JPS62184734U true JPS62184734U (enrdf_load_stackoverflow) 1987-11-24

Family

ID=30916991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7302586U Pending JPS62184734U (enrdf_load_stackoverflow) 1986-05-15 1986-05-15

Country Status (1)

Country Link
JP (1) JPS62184734U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009164379A (ja) * 2008-01-08 2009-07-23 Dainippon Screen Mfg Co Ltd 熱処理装置
JP2009272399A (ja) * 2008-05-02 2009-11-19 Dainippon Screen Mfg Co Ltd 熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009164379A (ja) * 2008-01-08 2009-07-23 Dainippon Screen Mfg Co Ltd 熱処理装置
JP2009272399A (ja) * 2008-05-02 2009-11-19 Dainippon Screen Mfg Co Ltd 熱処理装置

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