JPS6183027U - - Google Patents

Info

Publication number

JPS6183027U

JPS6183027U JP16732084U JP16732084U JPS6183027U JP S6183027 U JPS6183027 U JP S6183027U JP 16732084 U JP16732084 U JP 16732084U JP 16732084 U JP16732084 U JP 16732084U JP S6183027 U JPS6183027 U JP S6183027U

Authority

JP

Japan

Prior art keywords

integrated circuit

semiconductor integrated

furnace core

core tube

manufacturing device

Prior art date

1984-11-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004519 manufacturing process Methods 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 235000012431 wafers Nutrition 0.000 claims 2
• 239000012159 carrier gas Substances 0.000 claims 1
• 239000007789 gas Substances 0.000 claims 1
• 238000003780 insertion Methods 0.000 claims 1
• 230000037431 insertion Effects 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 239000000376 reactant Substances 0.000 claims 1