JPS6182985A - 電子ビ−ムの焦点位置自動調整方法 - Google Patents

電子ビ−ムの焦点位置自動調整方法

Info

Publication number
JPS6182985A
JPS6182985A JP59202036A JP20203684A JPS6182985A JP S6182985 A JPS6182985 A JP S6182985A JP 59202036 A JP59202036 A JP 59202036A JP 20203684 A JP20203684 A JP 20203684A JP S6182985 A JPS6182985 A JP S6182985A
Authority
JP
Japan
Prior art keywords
electron beam
current
focal position
focusing lens
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59202036A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422676B2 (enExample
Inventor
Masaharu Moriyasu
雅治 森安
Yoshio Yamane
山根　義雄
Masahiko Sakamoto
雅彦 阪本
Masatake Hiramoto
平本　誠剛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59202036A priority Critical patent/JPS6182985A/ja
Publication of JPS6182985A publication Critical patent/JPS6182985A/ja
Publication of JPH0422676B2 publication Critical patent/JPH0422676B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/02—Control circuits therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP59202036A 1984-09-28 1984-09-28 電子ビ−ムの焦点位置自動調整方法 Granted JPS6182985A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59202036A JPS6182985A (ja) 1984-09-28 1984-09-28 電子ビ−ムの焦点位置自動調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59202036A JPS6182985A (ja) 1984-09-28 1984-09-28 電子ビ−ムの焦点位置自動調整方法

Publications (2)

Publication Number Publication Date
JPS6182985A true JPS6182985A (ja) 1986-04-26
JPH0422676B2 JPH0422676B2 (enExample) 1992-04-20

Family

ID=16450867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59202036A Granted JPS6182985A (ja) 1984-09-28 1984-09-28 電子ビ−ムの焦点位置自動調整方法

Country Status (1)

Country Link
JP (1) JPS6182985A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015095397A (ja) * 2013-11-13 2015-05-18 日本電子株式会社 集束イオンビーム装置及びイオンビームの焦点調整方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015095397A (ja) * 2013-11-13 2015-05-18 日本電子株式会社 集束イオンビーム装置及びイオンビームの焦点調整方法

Also Published As

Publication number Publication date
JPH0422676B2 (enExample) 1992-04-20

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