JPS6181657U - - Google Patents
Info
- Publication number
- JPS6181657U JPS6181657U JP1984166348U JP16634884U JPS6181657U JP S6181657 U JPS6181657 U JP S6181657U JP 1984166348 U JP1984166348 U JP 1984166348U JP 16634884 U JP16634884 U JP 16634884U JP S6181657 U JPS6181657 U JP S6181657U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- light
- transmitting
- mask
- transparent mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984166348U JPS6181657U (lv) | 1984-10-31 | 1984-10-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984166348U JPS6181657U (lv) | 1984-10-31 | 1984-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6181657U true JPS6181657U (lv) | 1986-05-30 |
Family
ID=30724169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984166348U Pending JPS6181657U (lv) | 1984-10-31 | 1984-10-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6181657U (lv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05134391A (ja) * | 1991-11-14 | 1993-05-28 | Mitsubishi Electric Corp | 露光用マスク |
-
1984
- 1984-10-31 JP JP1984166348U patent/JPS6181657U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05134391A (ja) * | 1991-11-14 | 1993-05-28 | Mitsubishi Electric Corp | 露光用マスク |
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