JPS6415236U - - Google Patents
Info
- Publication number
- JPS6415236U JPS6415236U JP1987109333U JP10933387U JPS6415236U JP S6415236 U JPS6415236 U JP S6415236U JP 1987109333 U JP1987109333 U JP 1987109333U JP 10933387 U JP10933387 U JP 10933387U JP S6415236 U JPS6415236 U JP S6415236U
- Authority
- JP
- Japan
- Prior art keywords
- light
- shielding pattern
- pattern member
- reticle
- embedded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987109333U JPS6415236U (lv) | 1987-07-16 | 1987-07-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987109333U JPS6415236U (lv) | 1987-07-16 | 1987-07-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6415236U true JPS6415236U (lv) | 1989-01-25 |
Family
ID=31345481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987109333U Pending JPS6415236U (lv) | 1987-07-16 | 1987-07-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415236U (lv) |
-
1987
- 1987-07-16 JP JP1987109333U patent/JPS6415236U/ja active Pending