JPS617566U - 多層膜形成装置 - Google Patents

多層膜形成装置

Info

Publication number
JPS617566U
JPS617566U JP9157584U JP9157584U JPS617566U JP S617566 U JPS617566 U JP S617566U JP 9157584 U JP9157584 U JP 9157584U JP 9157584 U JP9157584 U JP 9157584U JP S617566 U JPS617566 U JP S617566U
Authority
JP
Japan
Prior art keywords
substrate
mask
multilayer film
film forming
forming equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9157584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238921Y2 (enrdf_load_stackoverflow
Inventor
洋一 加藤
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP9157584U priority Critical patent/JPS617566U/ja
Publication of JPS617566U publication Critical patent/JPS617566U/ja
Application granted granted Critical
Publication of JPH0238921Y2 publication Critical patent/JPH0238921Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP9157584U 1984-06-21 1984-06-21 多層膜形成装置 Granted JPS617566U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9157584U JPS617566U (ja) 1984-06-21 1984-06-21 多層膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9157584U JPS617566U (ja) 1984-06-21 1984-06-21 多層膜形成装置

Publications (2)

Publication Number Publication Date
JPS617566U true JPS617566U (ja) 1986-01-17
JPH0238921Y2 JPH0238921Y2 (enrdf_load_stackoverflow) 1990-10-19

Family

ID=30647585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9157584U Granted JPS617566U (ja) 1984-06-21 1984-06-21 多層膜形成装置

Country Status (1)

Country Link
JP (1) JPS617566U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338177U (enrdf_load_stackoverflow) * 1989-08-26 1991-04-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338177U (enrdf_load_stackoverflow) * 1989-08-26 1991-04-12

Also Published As

Publication number Publication date
JPH0238921Y2 (enrdf_load_stackoverflow) 1990-10-19

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