JPS617566U - Multilayer film forming equipment - Google Patents

Multilayer film forming equipment

Info

Publication number
JPS617566U
JPS617566U JP9157584U JP9157584U JPS617566U JP S617566 U JPS617566 U JP S617566U JP 9157584 U JP9157584 U JP 9157584U JP 9157584 U JP9157584 U JP 9157584U JP S617566 U JPS617566 U JP S617566U
Authority
JP
Japan
Prior art keywords
substrate
mask
multilayer film
film forming
forming equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9157584U
Other languages
Japanese (ja)
Other versions
JPH0238921Y2 (en
Inventor
洋一 加藤
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP9157584U priority Critical patent/JPS617566U/en
Publication of JPS617566U publication Critical patent/JPS617566U/en
Application granted granted Critical
Publication of JPH0238921Y2 publication Critical patent/JPH0238921Y2/ja
Granted legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の実施例の截断側面図、第２図はその■
−■線部分の拡大図、第３図は第２図の■一■線部分の
断面図第４図は要部の拡大断面図である。 １・・・真空槽、２・・・基板、３・・・蒸発源、４・
・・マズク、５・・・透孔、６・・・マスクホルタ、７
・・・マスク昇降部材。Figure 1 is a cutaway side view of the embodiment of the present invention, and Figure 2 is its
FIG. 3 is an enlarged sectional view of the section lined ``-■'' in FIG. 2; FIG. 4 is an enlarged sectional view of the main part. 1... Vacuum chamber, 2... Substrate, 3... Evaporation source, 4...
...Mazuku, 5...Through hole, 6...Mask holster, 7
...Mask lifting member.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空槽１内に基板２と対向して蒸発源３を設け、該基板
２の表面にパターン形成用のマスク４を施してその表面
に蒸発物質のパターンを形成する式のものに於いて、該
真空槽１内に複数個の蒸発源３を用意し、該基板２の前
方へ進出自在にマスク４を挿着した複数個の透孔５を有
するマスクホルダ６を設け、該基板２のマスクホルタ６
を介しての対向側に該マスク４を基板２に当接させるマ
スク昇降部材７を設けて成る多層膜形成装置。In a type in which an evaporation source 3 is provided in a vacuum chamber 1 facing a substrate 2, and a pattern-forming mask 4 is applied to the surface of the substrate 2 to form a pattern of evaporated material on the surface. A plurality of evaporation sources 3 are prepared in a vacuum chamber 1, a mask holder 6 having a plurality of through holes 5 into which masks 4 are inserted so as to be able to advance forward of the substrate 2 is provided, and a mask holder 6 of the substrate 2 is provided.
A multilayer film forming apparatus comprising a mask lifting member 7 for bringing the mask 4 into contact with the substrate 2 on the opposite side thereof.
JP9157584U 1984-06-21 1984-06-21 Multilayer film forming equipment Granted JPS617566U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9157584U JPS617566U (en) 1984-06-21 1984-06-21 Multilayer film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9157584U JPS617566U (en) 1984-06-21 1984-06-21 Multilayer film forming equipment

Publications (2)

Publication Number Publication Date
JPS617566U true JPS617566U (en) 1986-01-17
JPH0238921Y2 JPH0238921Y2 (en) 1990-10-19

Family

ID=30647585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9157584U Granted JPS617566U (en) 1984-06-21 1984-06-21 Multilayer film forming equipment

Country Status (1)

Country Link
JP (1) JPS617566U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338177U (en) * 1989-08-26 1991-04-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338177U (en) * 1989-08-26 1991-04-12
JPH0541806Y2 (en) * 1989-08-26 1993-10-21

Also Published As

Publication number Publication date
JPH0238921Y2 (en) 1990-10-19

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