JPS58195239U - mask contact printer - Google Patents
mask contact printerInfo
- Publication number
- JPS58195239U JPS58195239U JP1982094246U JP9424682U JPS58195239U JP S58195239 U JPS58195239 U JP S58195239U JP 1982094246 U JP1982094246 U JP 1982094246U JP 9424682 U JP9424682 U JP 9424682U JP S58195239 U JPS58195239 U JP S58195239U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- contact printer
- mask contact
- printer
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のマスクコンタクトプリンターの構成を示
す断面図、第２図のイ１ロ、へ図は密着性についての具
体例を説明するための図、第３図は本考案の一実施例で
あるマスクコンタクトプリンターの構成を示す断面図、
第４図は第３図のＡ−Ａ’部を示す上方部分の平面図で
ある。
図中、２１はマスク原板、２２は支持体、２３゜２４．
２５．２６は真空源供給路、２７は複製用マスク。Fig. 1 is a sectional view showing the configuration of a conventional mask contact printer, Figs. A cross-sectional view showing the configuration of a mask contact printer, which is
FIG. 4 is a plan view of the upper portion taken along line AA' in FIG. 3. In the figure, 21 is a mask original plate, 22 is a support, 23° 24.
25 and 26 are vacuum source supply channels, and 27 is a mask for duplication.
Claims (1)
、露光により画像を転写するマスクコンタクトプリンタ
ーであって、該マスクを支持する支持体に複数個の真空
供給路を設けてなることを特徴とするマスクコンタクト
プリンター。A mask contact printer that brings a mask and a substrate to which an image of the mask is to be transferred into close contact and transfers the image by exposure, characterized in that a support supporting the mask is provided with a plurality of vacuum supply channels. Mask contact printer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982094246U JPS58195239U (en) | 1982-06-23 | 1982-06-23 | mask contact printer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982094246U JPS58195239U (en) | 1982-06-23 | 1982-06-23 | mask contact printer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58195239U true JPS58195239U (en) | 1983-12-26 |
Family
ID=30225684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982094246U Pending JPS58195239U (en) | 1982-06-23 | 1982-06-23 | mask contact printer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58195239U (en) |
-
1982
- 1982-06-23 JP JP1982094246U patent/JPS58195239U/en active Pending
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