JPS6175057U - - Google Patents

Info

Publication number
JPS6175057U
JPS6175057U JP16005484U JP16005484U JPS6175057U JP S6175057 U JPS6175057 U JP S6175057U JP 16005484 U JP16005484 U JP 16005484U JP 16005484 U JP16005484 U JP 16005484U JP S6175057 U JPS6175057 U JP S6175057U
Authority
JP
Japan
Prior art keywords
electrode
irradiation device
charged particle
particle irradiation
shield cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16005484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429478Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984160054U priority Critical patent/JPH0429478Y2/ja
Publication of JPS6175057U publication Critical patent/JPS6175057U/ja
Application granted granted Critical
Publication of JPH0429478Y2 publication Critical patent/JPH0429478Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1984160054U 1984-10-23 1984-10-23 Expired JPH0429478Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984160054U JPH0429478Y2 (enrdf_load_html_response) 1984-10-23 1984-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984160054U JPH0429478Y2 (enrdf_load_html_response) 1984-10-23 1984-10-23

Publications (2)

Publication Number Publication Date
JPS6175057U true JPS6175057U (enrdf_load_html_response) 1986-05-21
JPH0429478Y2 JPH0429478Y2 (enrdf_load_html_response) 1992-07-16

Family

ID=30717988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984160054U Expired JPH0429478Y2 (enrdf_load_html_response) 1984-10-23 1984-10-23

Country Status (1)

Country Link
JP (1) JPH0429478Y2 (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918352U (ja) * 1982-07-28 1984-02-03 日本電子株式会社 静電レンズ構造

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918352U (ja) * 1982-07-28 1984-02-03 日本電子株式会社 静電レンズ構造

Also Published As

Publication number Publication date
JPH0429478Y2 (enrdf_load_html_response) 1992-07-16

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