JPS6173012U - - Google Patents

Info

Publication number
JPS6173012U
JPS6173012U JP15786684U JP15786684U JPS6173012U JP S6173012 U JPS6173012 U JP S6173012U JP 15786684 U JP15786684 U JP 15786684U JP 15786684 U JP15786684 U JP 15786684U JP S6173012 U JPS6173012 U JP S6173012U
Authority
JP
Japan
Prior art keywords
exhaust gas
seal
inorganic material
purification device
gas purification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15786684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029056Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15786684U priority Critical patent/JPH029056Y2/ja
Publication of JPS6173012U publication Critical patent/JPS6173012U/ja
Application granted granted Critical
Publication of JPH029056Y2 publication Critical patent/JPH029056Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exhaust Gas After Treatment (AREA)
JP15786684U 1984-10-18 1984-10-18 Expired JPH029056Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15786684U JPH029056Y2 (https=) 1984-10-18 1984-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15786684U JPH029056Y2 (https=) 1984-10-18 1984-10-18

Publications (2)

Publication Number Publication Date
JPS6173012U true JPS6173012U (https=) 1986-05-17
JPH029056Y2 JPH029056Y2 (https=) 1990-03-06

Family

ID=30715856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15786684U Expired JPH029056Y2 (https=) 1984-10-18 1984-10-18

Country Status (1)

Country Link
JP (1) JPH029056Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01236814A (ja) * 1988-03-17 1989-09-21 Tokyo Electron Ltd 位相比較方式

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01236814A (ja) * 1988-03-17 1989-09-21 Tokyo Electron Ltd 位相比較方式

Also Published As

Publication number Publication date
JPH029056Y2 (https=) 1990-03-06

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