JPS6173012U - - Google Patents
Info
- Publication number
- JPS6173012U JPS6173012U JP15786684U JP15786684U JPS6173012U JP S6173012 U JPS6173012 U JP S6173012U JP 15786684 U JP15786684 U JP 15786684U JP 15786684 U JP15786684 U JP 15786684U JP S6173012 U JPS6173012 U JP S6173012U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- seal
- inorganic material
- purification device
- gas purification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003197 catalytic effect Effects 0.000 claims description 4
- 229910010272 inorganic material Inorganic materials 0.000 claims description 4
- 239000011147 inorganic material Substances 0.000 claims description 4
- 238000000746 purification Methods 0.000 claims description 4
- 239000010425 asbestos Substances 0.000 claims description 3
- 229910052895 riebeckite Inorganic materials 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Exhaust Gas After Treatment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15786684U JPH029056Y2 (cs) | 1984-10-18 | 1984-10-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15786684U JPH029056Y2 (cs) | 1984-10-18 | 1984-10-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6173012U true JPS6173012U (cs) | 1986-05-17 |
JPH029056Y2 JPH029056Y2 (cs) | 1990-03-06 |
Family
ID=30715856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15786684U Expired JPH029056Y2 (cs) | 1984-10-18 | 1984-10-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH029056Y2 (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01236814A (ja) * | 1988-03-17 | 1989-09-21 | Tokyo Electron Ltd | 位相比較方式 |
-
1984
- 1984-10-18 JP JP15786684U patent/JPH029056Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01236814A (ja) * | 1988-03-17 | 1989-09-21 | Tokyo Electron Ltd | 位相比較方式 |
Also Published As
Publication number | Publication date |
---|---|
JPH029056Y2 (cs) | 1990-03-06 |
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