JPS6171950A - Ultrasonic vibration type float polishing device - Google Patents

Abstract

PURPOSE:To actively crush abrasive grains and sharply reduce a float polishing hour by mounting a device to cause a float polishing dish or a work to ultrasonically vibrate. CONSTITUTION:When a float polishing dish 5 immersed in processing liquid 12 is rotated round a shaft 9 through an external rotating body 6 by a motor 7, pressure opposite to the direction of gravity is caused by dynamic pressure effect on the groove of the float polishing dish 5. At this time, pressure lower than dynamic pressure is applied to a work 9 by means of a holder 10 to press the work 9 against the float polishing dish 5 as the work 9 is rotated with a ho older 10 by a motor 11. Thus the work 9 is polished owing to its collision with polishing material though getting out of contact with the float polishing dish 5. When the power source of a generator 1 is turned on, an ultrasonic signal is transmitted through a brush 3 to a piezoelectric transducer 2, and an ultrasonic vibration produced by the transducer 2 in circumferential direction is transmitted to free abrasive grains between the float polishing dish 5 and the work 9.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Field of Application> The present invention relates to a float polishing device, and particularly to an ultrasonic vibration float polishing device that reduces processing time.

<Conventional technology> Float polishing is a polishing method in which the object to be polished is made to float, and ultrafine abrasive particles collide with the surface to be polished, removing minute amounts of the surface. However, conventional float polishing equipment uses a polishing method that presses loose abrasive grains using the dynamic pressure effect of a fluid.

<Problems to be solved by the invention> By the way, with the polishing method described above, the amount of polishing is small;
The disadvantage was that the processing time was long.

SUMMARY OF THE INVENTION An object of the present invention is to provide a float polishing device that eliminates the drawbacks of the prior art described above and can significantly shorten machining time.

〈Means for solving problems〉 The present invention will be explained based on the drawings.

FIG. 1 is a sectional view of essential parts of an ultrasonic vibration float polishing apparatus according to the present invention.

In the figure, 1 is an oscillator that generates an ultrasonic signal, 2 is an ultrasonic wave that receives the signal from the oscillator 1 via a brush 3, and vibrates ultrasonically with a minute angular displacement in the circumferential direction with respect to the axis a. The sonic vibrator 4 is a horn for transmitting vibrations generated by the ultrasonic vibrator 2 to the floating polishing plate 5, and is fixed to the external rotary body 6 by screws or the like using a joint. The float polishing plate 5 has fine grooves formed in the circumferential direction on its surface to generate a dynamic pressure effect. In addition, ultrasonic transducer 2. The horn 4 and the float polishing plate 5 are a resonant system having the same natural frequency as that of the ultrasonic vibrator 2, and the entire resonant system is rotatably installed at the bottom of the processing tank 8 and has a watertight structure. The floating polishing plate 5 is coaxially fixed to an external rotary body 6 supported by the morph 7.
It is configured to rotate around the shaft 3 via the external rotating body 6.

A workpiece 9, such as a lens to be polished, is held in a holder 10 facing the polishing plate 5, and is rotated around an axis together with the holder 10 by a morph 11. The machining tank 8 is filled with a machining fluid 12 containing an abrasive, and the machining fluid 12 is filled with the float polishing plate 5.
and the workpiece 9 is immersed.

<For cattle> Next, its effect will be explained.

First, the float polishing plate 5 immersed in the machining fluid 12 is placed on the morph 7
When rotated around the axis 3 via the external rotating body 6,
Pressure is generated in the groove surfaces of the flow plates 1 to 5 in the direction opposite to the direction of gravity due to the dynamic pressure effect.

Here, the workpiece 9 is rotated together with the holder 10 by the morph 11 and is pressed against the float polishing plate 5 by applying a pressure equal to or lower than the dynamic pressure with the holder 10 .

Then, although the float polishing plate 5 and the workpiece 9 are in a non-contact state, the workpiece 9 is polished by the collision of the abrasive.

Next, when the oscillator 1 is turned on, the generated ultrasonic signal is transmitted to the ultrasonic vibrator 2 via the brush 3, and the circumferential ultrasonic vibration generated here causes the horn 4 to flow! - The abrasive grains are finally transmitted through the polishing plate 5 to the free abrasive grains interposed between the float polishing plate 5 and the workpiece 9.

When ultrasonic vibrations are transmitted to free abrasive grains in this way, the free abrasive grains vibrate with minute amplitudes, resulting in long motion trajectories per unit time and lack of regularity in the direction of motion. Since the abrasive grains are actively crushed, the amount of workpiece processing can be increased and the workpiece can be processed in a short time.

<Embodiments> FIGS. 2 to 4 show essential parts of various embodiments of the present invention, and the same 44 pages as shown in FIG. 1 are given the same reference numerals.

In Fig. 2, the direction of ultrasonic vibration of the float polishing plate 5 is in the direction of its rotation axis a, and in Fig. 3, the direction of ultrasonic vibration of the float polishing plate 5 is set to the axial direction of its rotation axis a, and in Fig. 3, instead of vibrating the float polishing plate 5 ultrasonically, the workpiece 9 side is The float polishing plate 5 is vibrated ultrasonically by an oscillator 21, an ultrasonic vibrator 22, a pawn 24, etc., and in FIG. , ultrasonic vibrations are applied by an ultrasonic vibrator 22, a horn 24, etc., respectively.

<Effects of the Invention> As explained above, the present invention has a simple structure in which an ultrasonic vibration device is attached to a float polishing plate or a workpiece, and has the effect of significantly reducing float polishing time.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing the structure of a float polishing device according to the present invention, and FIGS. 2 to 4 show various embodiments of the present invention.
Figure 2 is a sectional view of the main part of a float polishing device that vibrates the polishing plate ultrasonically in the axial direction, Figure 3 is a sectional view of the main part of the float polishing device that vibrates the workpiece ultrasonically, and Figure 4 is the polishing plate. FIG. 2 is a sectional view of a main part of a float polishing device in which a workpiece and a workpiece are vibrated ultrasonically. 1.21... Oscillator, 2.22... Ultrasonic transducer,
4.24... Pawn, 5... Polishing plate, 8... Processing tank, 9... Workpiece, 10... Holder, 12...
・Working fluid〇Figure 1b Figure 2 JP-A-61. -71950(3) Figure 3 (and Figure 4)

Claims (1)

[Claims] 1. An ultrasonic vibrating float polishing device, characterized in that it is equipped with an ultrasonic vibration generator for ultrasonic vibration of a float polishing plate or a workpiece.