JPS6171352A - Automatic gas pressure control device - Google Patents

Abstract

PURPOSE:To increase the life of a solenoid valve by detecting the amount, which is lower or higher than a preset value of the gas pressure in a gas adjusting container that supplies gas to a capillary column on a silicon wafer, and controlling the solenoid valve based on by the signal, which adjusts the preset value of the detecting means. CONSTITUTION:When a gas adjusting container 1 supplies gas to a capillary column 8 through a gas injecting port 7, the gas pressure in the container 1 is decreased. The value is detected by a pressure sensor 3 and transmitted to an adjusting gage 4. When the value is lower than a preset lower limit value 9 in the adjusting gage 4, the adjusting gage 4 continues the ON and OFF operations of a solenoid valve 2. The adjusting gage 4 has a value presetting function, by which the solenoid valve 2 is operated when the gage receives the signal from the pressure sensor 3 of the container 1. During the period a pressure value in the container 1 increases up to the preset value, the solenoid valve 2 continues the ON and OFF operation. When the value exceeds the upper limit preset value 10, the adjusting gage 4 turns OFF the solenoid valve 2. Thus the number of ON and OFF operations of the solenoid valve is reduced, and the life of the solenoid valve can be increased.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to the gas pressure and Regarding the control of the gas flow rate, the present invention relates to controlling the pressure in the gas flow container by controlling a solenoid valve using a pressure sensor and a pressure meter.

(Prior Art and Its Problems) Control II devices used to supply constant gas pressure to the cavillary columns of gas fluid passages on silicon wafers are continuous controls such as diaphragm or spherical valves. He was using a valve.

However, since the gas fluid on the silicon wafer cavity column inflows minute gases on the order of nano-rifdles, continuous control valves such as Guyar 7-7 valves or spherical valves require precise and high-precision machining and finishing. However, there were problems in that it required a lot of man-hours and was expensive.

(Object of the Invention) The present invention solves these problems by using a solenoid valve controlled by a pressure sensor and a controller instead of a continuous control valve such as a diaphragm or a spherical valve.・Automatic bus pressure $ control that can completely control the gas pressure and gas flow rate supplied to the column! The purpose is to provide equipment.

(Structure of the Invention) The present invention determines whether the gas pressure in the gas regulating container is above or below a set value when a constant gas pressure is supplied from the gas regulating container to a capillary column on a silicon wafer. A detection means, an adjustment means for adjusting the setting value of the detection means, and a signal from the adjustment means to turn on the
This is an automatic gas pressure control device that can automatically control the gas pressure in the gas regulating container using a solenoid valve that is turned OFF.

In other words, the solenoid valve that controls the gas pressure in the gas regulating container is
It is turned on at regular intervals by a signal from a pressure sensor, which is a detection means that detects the gas pressure in the gas adjustment container, and a signal from a controller, which is a detection means that determines whether the gas pressure is above or below a set value.

By repeating and continuing the OFF operation, the pressure in the gas regulating container is increased, and when the pressure setting of the controller exceeds a certain level, the OFF state is entered.

In addition, the solenoid valve is ON and OFF at a constant cycle! Regarding IJ operation, the gas pressure can be automatically adjusted by lengthening the ON state of the solenoid valve in proportion to the magnitude of the pressure setting value of the W4 moderator.

(Example of the invention) Embodiments of the present invention will be described based on the drawings.

FIG. 1 is a schematic diagram showing the configuration of the present invention, and FIG. 12 is a schematic diagram showing the pressure setting method in the present invention.

In FIG. 1, when gas regulating vessel 1 supplies gas to cavillary column 8 through the gas injection lower, the gas pressure in gas regulating vessel 1 decreases. Pressure sensor 3
is detected and transmitted to the controller 4, and if the lower limit pressure in the controller 4 is less than the set value 9, the controller 4 turns the solenoid valve 2 ON and OFF.
Continue F operation. The controller 4 has a set value function of receiving a signal from the pressure sensor 3 of the pressure container 1 and operating the solenoid valve 2.

In Fig. 2, 9 indicates the lower limit set value of the controller 4, 10 indicates the upper limit pressure value added to the pressure set value, 11 indicates the operating range of the solenoid valve 2, and 12 indicates the stop range of the solenoid valve 2. While the pressure in the gas regulating container 1 increases and the pressure value 10 rises to the set value, the solenoid valve 2 continues to turn ON and OFF, and when the upper limit plus the set value 10 or more is reached, the controller 4 turns the solenoid valve 2 OFF.
Set to F state.

Since a large amount of gas is supplied from the gas regulating container 1 while the solenoid valve 2 is in the OFF state, the gas pressure in the gas regulating container 1 decreases, this signal is detected by the pressure sensor 3, and the lower limit pressure of the IWn meter 4 is set. The solenoid valve 2 is turned OFF until the value reaches 9, and when the set value exceeds 9, the solenoid valve 2 is turned ON and OFF again.

Regarding the constant cycle ON' and OFF operation of the solenoid valve 2,
In the present invention, the solenoid valve 2 is not necessarily turned on or off by lengthening the ON state in proportion to the magnitude of the pressure drop value.
It is not necessary that the F period be constant.

(Object of the invention) Since the present invention has the above configuration, it is possible to turn on the solenoid valve.
This is a highly reliable and inexpensive automatic gas pressure control device that reduces the number of OFF times and dramatically improves the life of the solenoid valve.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing the configuration of the present invention, and FIG. 2 is a diagram showing pressure setting values of the present invention. 1... Gas W4fflI container 2... Solenoid valve 3.
...Pressure sensor 4...Controller 5...Signal l1
16... Gas injection vibe 7... Gas injection port 8
... Cavillary column 9 ... Pressure set value lower limit 10 ... Pressure set value upper limit 11 ... Solenoid valve operating region 12 ... Solenoid valve stop region

Claims (1)

[Scope of Claims] In the case of supplying a constant gas pressure from a gas regulation container to a capillary column on a silicon wafer, a detection means for determining whether the gas pressure in the gas regulation container is above or below a set value; An automatic gas pressure control device comprising: an adjusting means for adjusting a set value of the detecting means; and a solenoid valve that is turned ON and OFF by a signal from the adjusting means.